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http://hdl.handle.net/1942/3817
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DC Field | Value | Language |
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dc.contributor.author | NESLADEK, Milos | - |
dc.contributor.author | QUAEYHAEGENS, Carl | - |
dc.contributor.author | WOUTERS, Stan | - |
dc.contributor.author | STALS, Lambert | - |
dc.contributor.author | Bergmann, E. | - |
dc.contributor.author | RETTINGHAUS, G | - |
dc.date.accessioned | 2007-11-29T13:54:28Z | - |
dc.date.available | 2007-11-29T13:54:28Z | - |
dc.date.issued | 1994 | - |
dc.identifier.citation | SURFACE & COATINGS TECHNOLOGY, 68. p. 339-343 | - |
dc.identifier.issn | 0257-8972 | - |
dc.identifier.uri | http://hdl.handle.net/1942/3817 | - |
dc.description.abstract | The energetic distribution of ions in a triode ion plating configuration during TiN deposition was investigated. The fluxes of different ions such as Ti+, N+, N-2(+), TiN+, TiAr+ impinging on the substrate, for various N partial pressures were measured by mass-energy spectrometry. The potential distribution in the plasma and the total ion flux towards the substrate were evaluated by Langmuir plasma probing. A model of the potential distribution in the triode ion plating plasma configuration is suggested and the Ti ionization for various plasma conditions is discussed. | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE SA LAUSANNE | - |
dc.title | STUDY OF THE ION ENERGY-DISTRIBUTION DURING PHYSICAL VAPOR-DEPOSITION OF TIN | - |
dc.type | Journal Contribution | - |
dc.identifier.epage | 343 | - |
dc.identifier.spage | 339 | - |
dc.identifier.volume | 68 | - |
local.format.pages | 5 | - |
dc.description.notes | BALZERS AG,FL-9496 BALZERS,LIECHTENSTEIN.NESLADEK, M, LIMBURGS UNIV CENTRUM,INST MAT RES,DIV MAT PHYS,SCI PK,CAMPUSLAAN,B-3590 DIEPENBEEK,BELGIUM. | - |
local.type.refereed | Refereed | - |
local.type.specified | Article | - |
dc.bibliographicCitation.oldjcat | A1 | - |
dc.identifier.isi | A1994PW03900056 | - |
item.accessRights | Closed Access | - |
item.fullcitation | NESLADEK, Milos; QUAEYHAEGENS, Carl; WOUTERS, Stan; STALS, Lambert; Bergmann, E. & RETTINGHAUS, G (1994) STUDY OF THE ION ENERGY-DISTRIBUTION DURING PHYSICAL VAPOR-DEPOSITION OF TIN. In: SURFACE & COATINGS TECHNOLOGY, 68. p. 339-343. | - |
item.fulltext | No Fulltext | - |
item.contributor | NESLADEK, Milos | - |
item.contributor | QUAEYHAEGENS, Carl | - |
item.contributor | WOUTERS, Stan | - |
item.contributor | STALS, Lambert | - |
item.contributor | Bergmann, E. | - |
item.contributor | RETTINGHAUS, G | - |
Appears in Collections: | Research publications |
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