Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3817
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dc.contributor.authorNESLADEK, Milos-
dc.contributor.authorQUAEYHAEGENS, Carl-
dc.contributor.authorWOUTERS, Stan-
dc.contributor.authorSTALS, Lambert-
dc.contributor.authorBergmann, E.-
dc.contributor.authorRETTINGHAUS, G-
dc.date.accessioned2007-11-29T13:54:28Z-
dc.date.available2007-11-29T13:54:28Z-
dc.date.issued1994-
dc.identifier.citationSURFACE & COATINGS TECHNOLOGY, 68. p. 339-343-
dc.identifier.issn0257-8972-
dc.identifier.urihttp://hdl.handle.net/1942/3817-
dc.description.abstractThe energetic distribution of ions in a triode ion plating configuration during TiN deposition was investigated. The fluxes of different ions such as Ti+, N+, N-2(+), TiN+, TiAr+ impinging on the substrate, for various N partial pressures were measured by mass-energy spectrometry. The potential distribution in the plasma and the total ion flux towards the substrate were evaluated by Langmuir plasma probing. A model of the potential distribution in the triode ion plating plasma configuration is suggested and the Ti ionization for various plasma conditions is discussed.-
dc.language.isoen-
dc.publisherELSEVIER SCIENCE SA LAUSANNE-
dc.titleStudy of the ion energy-distribution during physical vapor-deposition of TiN-
dc.typeJournal Contribution-
dc.identifier.epage343-
dc.identifier.spage339-
dc.identifier.volume68-
local.format.pages5-
dc.description.notesBALZERS AG,FL-9496 BALZERS,LIECHTENSTEIN.NESLADEK, M, LIMBURGS UNIV CENTRUM,INST MAT RES,DIV MAT PHYS,SCI PK,CAMPUSLAAN,B-3590 DIEPENBEEK,BELGIUM.-
local.type.refereedRefereed-
local.type.specifiedArticle-
dc.bibliographicCitation.oldjcatA1-
dc.identifier.isiA1994PW03900056-
item.fulltextNo Fulltext-
item.accessRightsClosed Access-
item.fullcitationNESLADEK, Milos; QUAEYHAEGENS, Carl; WOUTERS, Stan; STALS, Lambert; Bergmann, E. & RETTINGHAUS, G (1994) Study of the ion energy-distribution during physical vapor-deposition of TiN. In: SURFACE & COATINGS TECHNOLOGY, 68. p. 339-343.-
item.contributorNESLADEK, Milos-
item.contributorQUAEYHAEGENS, Carl-
item.contributorWOUTERS, Stan-
item.contributorSTALS, Lambert-
item.contributorBergmann, E.-
item.contributorRETTINGHAUS, G-
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