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Title: | Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer | Authors: | Baehr, Mario Kaepplinger, Indira POBEDINSKAS, Paulius Frank, Thomas Gruen, Andre HAENEN, Ken Ortlepp, Thomas |
Issue Date: | 2022 | Publisher: | WILEY-V C H VERLAG GMBH | Source: | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, (Art N° 2200309) | Status: | Early view | Abstract: | The rear side of a pressure sensor diaphragm is prepared with an additional diamond layer as protective coating against harsh media. The preparation sequence for the diamond coating is developed as a simple backend process, combining only two additional steps in the standard process. These are the local seeding of nanodiamond layer and the low-temperature diamond growth at <300 degrees C in a linear antenna microwave plasma-enhanced chemical vapor deposition reactor, where only at the nanodiamond seeded sites, a high-quality diamond film was synthesized. The seeding resolution in the setup used was limited to approximate to 80 mu m, but can be further reduced. In an industry-typical assembly sequence the diamond coated pressure sensor devices are further equipped with a support wafer and mounted to a TO-8 socket. Tests of such sensor systems indicate that the diamond layer does not hamper the stability of the device. This proofed method of postprocessing an only-local and low-temperature synthesis of a diamond layer on the wafer-level opens- up possibilities for many other applications, since this approach is scalable and in general cost effective. | Notes: | Bahr, M (corresponding author), CiS Forschungsinst Mikrosensor GmbH, Konrad Zuse Str 14, D-99099 Erfurt, Germany. mbaehr@cismst.de |
Keywords: | chemical passivation;local seeding synthesis;low-temperature diamond synthesis;pressure sensors | Document URI: | http://hdl.handle.net/1942/38877 | ISSN: | 1862-6300 | e-ISSN: | 1862-6319 | DOI: | 10.1002/pssa.202200309 | ISI #: | 000874117400001 | Rights: | 2022 The Authors. physica status solidi (a) applications and materials science published by Wiley-VCH GmbH. This is an open access article under the terms of the Creative Commons Attribution-NonCommercial License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited and is not used for commercial purposes. | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2023 |
Appears in Collections: | Research publications |
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Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer.pdf | Published version | 1.95 MB | Adobe PDF | View/Open |
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