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Title: | The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films | Authors: | MARY JOY, Rani POBEDINSKAS, Paulius Baule, Nina Bai, Shengyuan Jannis, Daen Gauquelin, Nicolas Pinault-Thaury, Marie-Amandine Jomard, François Becker, Michael Frank ROUZBAHANI BAYATANI, Rozita KAMATCHI JOTHIRAMALINGAM, Sankaran DESTA, Derese D'HAEN, Jan LLORET, Fernando VERBEECK, Johan HAENEN, Ken |
Issue Date: | 2024 | Publisher: | PERGAMON-ELSEVIER SCIENCE LTD | Source: | ACTA MATERIALIA, 264 (Art N° 119548) | Abstract: | This study reports the impact of film microstructure and composition on the Young's modulus and residual stress in nanocrystalline diamond (NCD) thin films (≈ 250 nm thick) grown on silicon substrates using a linear antenna microwave plasma-enhanced chemical vapor deposition (CVD) system. Combining laser acoustic wave spectroscopy to determine the elastic properties with simple wafer curvature measurements, a straightforward method to determine the intrinsic stress in NCD films is presented. Two deposition parameters are varied: (1) the substrate temperature from 400 °C to 900 °C, and (2) the [P]/[C] ratio from 0 ppm to 8090 ppm in the H 2 /CH 4 /CO 2 /PH 3 diamond CVD plasma. The introduction of PH 3 induces a transition in the morphology of the diamond film, shifting from NCD with larger grains to ultra-NCD with a smaller grain size, concurrently resulting in a decrease in Young's modulus. Results show that the highest Young's modulus of (1130 ± 50) GPa for the undoped NCD deposited at 800 °C is comparable to single crystal diamond, indicating that NCD with excellent mechanical properties is achievable with our process for thin diamond films. Based on the film stress results, we propose the origins of tensile intrinsic stress in the diamond films. In NCD, the tensile intrinsic stress is attributed to larger grain size, while in ultra-NCD films the tensile intrinsic stress is due to grain boundaries and impurities. | Notes: | Joy, RM (corresponding author), Hasselt Univ, Inst Mat Res IMO, Wetenschapspk 1, B-3590 Diepenbeek, Belgium. rani.maryjoy@uhasselt.be; paulius.pobedinskas@uhasselt.be; ken.haenen@uhasselt.be |
Keywords: | Linear antenna CVD reactor;Nanocrystalline diamond;Young's modulus;Residual stress;Phosphorus doping | Document URI: | http://hdl.handle.net/1942/42026 | ISSN: | 1359-6454 | e-ISSN: | 1873-2453 | DOI: | 10.1016/j.actamat.2023.119548 | ISI #: | 001126632800001 | Rights: | 2023 Published by Elsevier Ltd on behalf of Acta Materialia Inc. | Category: | A1 | Type: | Journal Contribution |
Appears in Collections: | Research publications |
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1-s2.0-S1359645423008777-main.pdf Restricted Access | Published version | 1.14 MB | Adobe PDF | View/Open Request a copy |
Binder1.pdf | Peer-reviewed author version | 8.63 MB | Adobe PDF | View/Open |
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