Development of high power magnetron sputtering targets prepared by flames spraying

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/4781

Title:	Development of high power magnetron sputtering targets prepared by flames spraying
Authors:	van Driessche, I. Carolissen, R. VANHOYLAND, Geert Hoste, S.
Issue Date:	1998
Source:	Institute of Physics converence series, 158. p. 141-144
Document URI:	http://hdl.handle.net/1942/4781
Type:	Journal Contribution
Appears in Collections:	Research publications

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