Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/4938
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dc.contributor.authorVANSTREELS, Kris-
dc.contributor.authorBrongersma, S.H.-
dc.contributor.authorDemuynck, S.-
dc.contributor.authorD'HAEN, Jan-
dc.contributor.authorDE CEUNINCK, Ward-
dc.contributor.authorD'OLIESLAEGER, Marc-
dc.contributor.authorMaex, Karen-
dc.date.accessioned2007-12-20T15:54:04Z-
dc.date.available2007-12-20T15:54:04Z-
dc.date.issued2004-
dc.identifier.citationProceedings of the Advanced Metallization Conference 2004, San Diego, Calif., USA, October 19-21. p. 327-331.-
dc.identifier.isbn1-55899-814-4-
dc.identifier.urihttp://hdl.handle.net/1942/4938-
dc.description.abstractA new grain growth mode is observed in thick copper seed layers deposited on alpha-Ta barriers. It leads to highly concentric growth and grains of many tens of microns. Initiation and growth of the grains is shown to be dependent on both the barrier properties and the copper layer thickness. A clear rivalry between this growth mode and normal secondary grain growth is observed, where the latter dominates at elevated temperatures. Also the final grain orientations are very different as no (111) growth is observed for the new mechanism.-
dc.language.isoen-
dc.publisherMATERIALS RESEARCH SOCIETY-
dc.titleSuper secondary grain growth in the barrier/seedlayer system-
dc.typeProceedings Paper-
local.bibliographicCitation.conferencenameADVANCED METALLIZATION CONFERENCE 2004-
dc.identifier.epage331-
dc.identifier.spage327-
local.bibliographicCitation.jcatC1-
local.type.refereedRefereed-
local.type.specifiedProceedings Paper-
dc.bibliographicCitation.oldjcatC1-
dc.identifier.isi000228037200043-
local.bibliographicCitation.btitleProceedings of the Advanced Metallization Conference 2004, San Diego, Calif., USA, October 19-21-
item.contributorVANSTREELS, Kris-
item.contributorBrongersma, S.H.-
item.contributorDemuynck, S.-
item.contributorD'HAEN, Jan-
item.contributorDE CEUNINCK, Ward-
item.contributorD'OLIESLAEGER, Marc-
item.contributorMaex, Karen-
item.accessRightsClosed Access-
item.fullcitationVANSTREELS, Kris; Brongersma, S.H.; Demuynck, S.; D'HAEN, Jan; DE CEUNINCK, Ward; D'OLIESLAEGER, Marc & Maex, Karen (2004) Super secondary grain growth in the barrier/seedlayer system. In: Proceedings of the Advanced Metallization Conference 2004, San Diego, Calif., USA, October 19-21. p. 327-331..-
item.fulltextNo Fulltext-
item.validationecoom 2006-
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