Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/5079
Title: Piezoelectric bimorph micro-cantilever: a new gas pressure sensor
Authors: MORTET, Vincent 
PETERSEN, Rainer 
HAENEN, Ken 
D'OLIESLAEGER, Marc 
Issue Date: 2005
Source: IEEE Ultrasonics Symposium: vol. 3. p. 1458-1459.
Document URI: http://hdl.handle.net/1942/5079
ISI #: 000236090702009
Category: C1
Type: Proceedings Paper
Validations: ecoom 2007
Appears in Collections:Research publications

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