Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/5748
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DC Field | Value | Language |
---|---|---|
dc.contributor.author | Proost, J. | - |
dc.contributor.author | Witvrouw, A. | - |
dc.contributor.author | COSEMANS, Patrick Peter | - |
dc.contributor.author | Roussel, Ph. | - |
dc.contributor.author | Maex, Karen | - |
dc.date.accessioned | 2007-12-20T16:01:42Z | - |
dc.date.available | 2007-12-20T16:01:42Z | - |
dc.date.issued | 1997 | - |
dc.identifier.citation | Microelectronic engineering, 33(1-4). p. 137-147 | - |
dc.identifier.uri | http://hdl.handle.net/1942/5748 | - |
dc.description.abstract | Substrate curvature measurements were used to study both the stress changes during thermal cycling and the kinetics of tensile stress relaxation in 800 nm Al (0.5wt% Cu)-films on oxidized Si-substrates. Qualitative microstructural evidence is provided for the observed decrease in room-temperature stress after the first and subsequent thermal cycles. Isothermal relaxation measurements at temperatures up to 100°C could be described well by dislocation glide with an activation energy of 3.0±0.3 eV and an average athermal flow stress of 600±200 MPa. Evidence for an Orowan-strengthening mechanism is provided by TEM-investigation. | - |
dc.language.iso | en | - |
dc.publisher | Elsevier Science B.V. | - |
dc.title | Stress relaxation in Al(Cu) thin films | - |
dc.type | Journal Contribution | - |
dc.identifier.epage | 147 | - |
dc.identifier.issue | 1-4 | - |
dc.identifier.spage | 137 | - |
dc.identifier.volume | 33 | - |
local.type.refereed | Refereed | - |
local.type.specified | Article | - |
dc.bibliographicCitation.oldjcat | - | |
dc.identifier.doi | 10.1016/S0167-9317(96)00039-1 | - |
item.fullcitation | Proost, J.; Witvrouw, A.; COSEMANS, Patrick Peter; Roussel, Ph. & Maex, Karen (1997) Stress relaxation in Al(Cu) thin films. In: Microelectronic engineering, 33(1-4). p. 137-147. | - |
item.accessRights | Closed Access | - |
item.contributor | Proost, J. | - |
item.contributor | Witvrouw, A. | - |
item.contributor | COSEMANS, Patrick Peter | - |
item.contributor | Roussel, Ph. | - |
item.contributor | Maex, Karen | - |
item.fulltext | No Fulltext | - |
Appears in Collections: | Research publications |
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