Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/6172
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Elmazria, O. | - |
dc.contributor.author | Elhakiki, M. | - |
dc.contributor.author | MORTET, Vincent | - |
dc.contributor.author | Assouar, Mohamed B. | - |
dc.contributor.author | Bouvot, L. | - |
dc.contributor.author | NESLADEK, Milos | - |
dc.contributor.author | Vanecek, M. | - |
dc.contributor.author | Bergonzo, P. | - |
dc.contributor.author | D'OLIESLAEGER, Marc | - |
dc.contributor.author | Alnot, P. | - |
dc.date.accessioned | 2007-12-20T16:05:38Z | - |
dc.date.available | 2007-12-20T16:05:38Z | - |
dc.date.issued | 2003 | - |
dc.identifier.citation | Yuhas, DE & Schneider, SC (Ed.) 2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS: vol. 1-2. p. 1746-1749. | - |
dc.identifier.isbn | 0-7803-7922-5 | - |
dc.identifier.issn | 1051-0117 | - |
dc.identifier.uri | http://hdl.handle.net/1942/6172 | - |
dc.description.abstract | In this work, the effect of diamond nucleation process on freestanding AIN/diamond SAW device performances were studied. Before diamond deposition, silicon substrates were mechanically nucleated, using an ultrasonic vibration table with sub-micron diamond slurry, and bias enhanced nucleated (BEN). Freestanding diamond layers obtained on mechanically scratched Si substrates exhibit a surface roughness of R-MS=13nm whereas very low surface roughness (as low as R(MS)less than or equal to1 nm) can be achieved on BEN diamond layer. Propagation losses (a) and electromechanical coupling coefficient (K-2) have been measured as a function of the operating frequency and the normalized AN film thickness (kh(AlN)=21pih(AIN)/lambda). Experimental results show that the propagation losses strongly depend on nucleation technique while the electromechanical coupling coefficient slightly depends on nucleation technique. | - |
dc.language.iso | en | - |
dc.publisher | IEEE | - |
dc.relation.ispartofseries | ULTRASONICS SYMPOSIUM | - |
dc.title | Effect of the diamond nucleation process on freestanding AIN/diamond SAW filter characteristics | - |
dc.type | Proceedings Paper | - |
dc.bibliographicCitation.bvolume | 1-2 | - |
local.bibliographicCitation.authors | Yuhas, DE | - |
local.bibliographicCitation.authors | Schneider, SC | - |
local.bibliographicCitation.conferencedate | OCT 05-08, 2003 | - |
local.bibliographicCitation.conferencename | IEEE International Ultrasonics Symposium | - |
local.bibliographicCitation.conferenceplace | Honolulu, HI, | - |
dc.identifier.epage | 1749 | - |
dc.identifier.spage | 1746 | - |
local.bibliographicCitation.jcat | C1 | - |
local.type.refereed | Refereed | - |
local.type.specified | Proceedings Paper | - |
dc.bibliographicCitation.oldjcat | C1 | - |
dc.identifier.isi | 000189492100404 | - |
local.bibliographicCitation.btitle | 2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS | - |
item.fullcitation | Elmazria, O.; Elhakiki, M.; MORTET, Vincent; Assouar, Mohamed B.; Bouvot, L.; NESLADEK, Milos; Vanecek, M.; Bergonzo, P.; D'OLIESLAEGER, Marc & Alnot, P. (2003) Effect of the diamond nucleation process on freestanding AIN/diamond SAW filter characteristics. In: Yuhas, DE & Schneider, SC (Ed.) 2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS: vol. 1-2. p. 1746-1749.. | - |
item.fulltext | No Fulltext | - |
item.contributor | Elmazria, O. | - |
item.contributor | Elhakiki, M. | - |
item.contributor | MORTET, Vincent | - |
item.contributor | Assouar, Mohamed B. | - |
item.contributor | Bouvot, L. | - |
item.contributor | NESLADEK, Milos | - |
item.contributor | Vanecek, M. | - |
item.contributor | Bergonzo, P. | - |
item.contributor | D'OLIESLAEGER, Marc | - |
item.contributor | Alnot, P. | - |
item.accessRights | Closed Access | - |
Appears in Collections: | Research publications |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.