Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/6906
Full metadata record
DC FieldValueLanguage
dc.contributor.authorVLEKKEN, Johan-
dc.contributor.authorPOLUS, Dany-
dc.contributor.authorD'OLIESLAEGER, Marc-
dc.contributor.authorVandervorst, W.-
dc.contributor.authorDE SCHEPPER, Luc-
dc.date.accessioned2007-12-20T16:11:27Z-
dc.date.available2007-12-20T16:11:27Z-
dc.date.issued2000-
dc.identifier.citationSIMS XII: Secondary Ion Mass Spectrsoscopy, Brussels. p. 341-344.-
dc.identifier.urihttp://hdl.handle.net/1942/6906-
dc.language.isoen-
dc.publisherELSEVIER SCIENCE SA-
dc.titleInvestigation of the formation of sputtered oxide clusters with the Laser Assisted Sputtered Neutral Mass Spectroscopy technique (LASNMS)-
dc.typeProceedings Paper-
local.bibliographicCitation.conferencedate2000-
local.bibliographicCitation.conferencename12th International Conference on Secondary Ion Mass Spectrometry-
local.bibliographicCitation.conferenceplaceBrussel, Belgium-
dc.identifier.epage344-
dc.identifier.spage341-
local.bibliographicCitation.jcatC2-
local.type.specifiedProceedings Paper-
dc.bibliographicCitation.oldjcatC2-
local.bibliographicCitation.btitleSIMS XII: Secondary Ion Mass Spectrsoscopy, Brussels-
item.accessRightsClosed Access-
item.fullcitationVLEKKEN, Johan; POLUS, Dany; D'OLIESLAEGER, Marc; Vandervorst, W. & DE SCHEPPER, Luc (2000) Investigation of the formation of sputtered oxide clusters with the Laser Assisted Sputtered Neutral Mass Spectroscopy technique (LASNMS). In: SIMS XII: Secondary Ion Mass Spectrsoscopy, Brussels. p. 341-344..-
item.contributorVLEKKEN, Johan-
item.contributorPOLUS, Dany-
item.contributorD'OLIESLAEGER, Marc-
item.contributorVandervorst, W.-
item.contributorDE SCHEPPER, Luc-
item.fulltextNo Fulltext-
Appears in Collections:Research publications
Show simple item record

Page view(s)

26
checked on Nov 1, 2023

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.