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Title: | Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films | Authors: | HARDY, An Van Elshocht, Sven D'HAEN, Jan DOUHERET, Olivier De Gendt, Stefan Adelmann, Christoph Caymax, Matty Conard, Thierry Witters, Thomas Bender, Hugo Richard, Olivier Heyns, Marc D'OLIESLAEGER, Marc VAN BAEL, Marlies MULLENS, Jules |
Issue Date: | 2007 | Publisher: | MATERIALS RESEARCH SOC | Source: | JOURNAL OF MATERIALS RESEARCH, 22(12). p. 3484-3493 | Abstract: | Ultrathin lanthanide (Nd, Pr, Eu, Sm) oxide films with functional dielectric properties down to 3.3 nm thickness were deposited by aqueous chemical solution deposition (CSD) onto hydrophilic SiO2/Si substrates. Precursor solutions were prepared from the oxides via an intermediate, solid Ln(III)citrate. A film heat treatment scheme was derived from thermogravimetric analysis of the precursor gels, showing complete decomposition by 600 degrees C. Crystalline phase formation in the films depended on the lanthanide, annealing temperature, and citric acid content in the precursor. Through variation of the precursor concentration and number of deposited layers, thickness series of uniform films were obtained down to similar to 3 nm. The film uniformity was demonstrated both by atomic force microscopy and cross-section transmission electron microscopy. The lanthanide oxide films possessed good dielectric properties. It was concluded that aqueous CSD allows deposition of uniform ultrathin films and may be useful for the evaluation of new high-k candidate materials. | Notes: | Hasselt Univ, Mat Res Inst, Lab Inorgan & Phys Chem, B-3590 Diepenbeek, Belgium. IMEC vzw, Div IMOMEC, B-3590 Diepenbeek, Belgium. IMEC vzw, B-3001 Heverlee, Belgium. Katholieke Univ Leuven, Dept Chem, B-3001 Heverlee, Belgium. XIOS Hogesch Limburg, Dept Ind Sci & Technol IWT, B-3590 Diepenbeek, Belgium.Van Bael, MK, Hasselt Univ, Mat Res Inst, Lab Inorgan & Phys Chem, B-3590 Diepenbeek, Belgium.marlies.vanbael@uhasselt.be jules.mullens@uhasselt.be | Document URI: | http://hdl.handle.net/1942/7820 | ISSN: | 0884-2914 | e-ISSN: | 2044-5326 | DOI: | 10.1557/JMR.2007.0433 | ISI #: | 000251487100026 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2009 |
Appears in Collections: | Research publications |
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