Energy and mass spectra of ions in triode ion plating of Ti(C,N) coatings

Abstract

Ti(C,N) coatings were deposited by triode ion plating in a mixture of argon, acetylene and nitrogen. The acetylene inlet was positioned at two different locations relative to the dense plasma. The energy distribution of selected ions during Ti(CxN1-x) deposition was measured by an energy resolved mass spectrometer. The mass spectra showed wide energy distributions of Ti ions, and energy distributions of other ionized molecules, clusters and radicals. A higher probability of acetylene dissociation with the acetylene inlet directed into the plasma was observed. Preferred orientation, lattice parameters and stress for the Ti(C,N) coatings were measured by X-ray diffraction. The measured compressive stress ranged from 8 to 13 GPa, the microhardness from 0.24 to 0.27 GPa. The scratch-test revealed an adhesion comparable to that of TiN coatings.