ZnO AlN diamond layered structure for SAW devices combining high velocity and high electromechanical coupling coefficient

Abstract

A new layered structure ZnO/AlN/diamond is studied for high frequency and high electromechanical coupling (K2) SAW devices. Theoretical study was performed to calculate the phase velocity and K2 dispersion curves of the Rayleigh mode and its higher modes as well as the leaky waves. Both high values of K2 (>4%) and acoustic velocities higher than 15km/s are expected with this new structure according to the theoretical results. To confirm the simulation results, SAW filters were processed on ZnO/AlN/diamond structure. First experimental results are in accordance with the theoretical ones and confirm the high potentiality of this new structure for the processing of high performances and high frequencies SAW filters.