Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/9820
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | HARDY, An | - |
dc.contributor.author | Adelmann, C. | - |
dc.contributor.author | Van Elshocht, S. | - |
dc.contributor.author | VAN DEN RUL, Heidi | - |
dc.contributor.author | VAN BAEL, Marlies | - |
dc.contributor.author | De Gendt, S. | - |
dc.contributor.author | D'OLIESLAEGER, Marc | - |
dc.contributor.author | Heyns, M. | - |
dc.contributor.author | Kittl, J.A. | - |
dc.contributor.author | MULLENS, Jules | - |
dc.date.accessioned | 2009-08-19T13:04:44Z | - |
dc.date.available | WITHHELD_ONE_YEAR | - |
dc.date.issued | 2009 | - |
dc.identifier.citation | APPLIED SURFACE SCIENCE, 255(17). p. 7812-7817 | - |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.uri | http://hdl.handle.net/1942/9820 | - |
dc.description.abstract | Grazing angle attenuated total reflectance Fourier transform infrared spectroscopy is applied to study ultrathin film Hf4+, Sc3+ and Dy3+ oxides, due to its high surface sensitivity. The (multi) metal oxides studied, are of interest as high-k dielectrics. Important properties affecting the permittivity, such as the amorphous or crystalline phase and interfacial reactions, are characterized. Dy2O3 is prone to silicate formation on SiO2/Si substrates, which is expressed in DyScO3 as well, but suppressed in HfDyOx. Sc2O3, HfScOx and HfO2 were found to be stable in contact with SiO2/Si. Deposition of HfO2 in between Dy2O3 or DyScO3 and SiO2, prevents silicate formation, showing a buffer-like behavior for the HfO2. Doping of HfO2 with Dy or Sc prevents monoclinic phase crystallization. Instead, a cubic phase is obtained, which allows a higher permittivity of the films. The phase remains stable after anneal at high temperature. (c) 2009 Elsevier B.V. All rights reserved. | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject.other | ATR-FTIR; Hafnia; Scandate; Rare earth; High permittivity | - |
dc.title | Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy | - |
dc.type | Journal Contribution | - |
dc.identifier.epage | 7817 | - |
dc.identifier.issue | 17 | - |
dc.identifier.spage | 7812 | - |
dc.identifier.volume | 255 | - |
local.format.pages | 6 | - |
local.bibliographicCitation.jcat | A1 | - |
dc.description.notes | [Hardy, A.; Van den Rul, H.; Van Bael, M. K.; Mullens, J.] Hasselt Univ, Inorgan & Phys Chem IMO, B-3590 Diepenbeek, Belgium. [Hardy, A.; Van den Rul, H.; Van Bael, M. K.; D'Olieslaeger, M.] IMEC VZW, Div IMOMEC, Diepenbeek, Belgium. [Adelmann, C.; Van Elshocht, S.; De Gendt, S.; Heyns, M.; Kittl, J. A.] IMEC VZW, Heverlee, Belgium. [D'Olieslaeger, M.] Hasselt Univ, Inst Mat Res, B-3590 Diepenbeek, Belgium. [De Gendt, S.; Heyns, M.] Katholieke Univ Leuven, Dept Chem, B-3001 Heverlee, Belgium. | - |
local.type.refereed | Refereed | - |
local.type.specified | Article | - |
dc.bibliographicCitation.oldjcat | A1 | - |
dc.identifier.doi | 10.1016/j.apsusc.2009.04.184 | - |
dc.identifier.isi | 000266567400061 | - |
item.contributor | HARDY, An | - |
item.contributor | Adelmann, C. | - |
item.contributor | Van Elshocht, S. | - |
item.contributor | VAN DEN RUL, Heidi | - |
item.contributor | VAN BAEL, Marlies | - |
item.contributor | De Gendt, S. | - |
item.contributor | D'OLIESLAEGER, Marc | - |
item.contributor | Heyns, M. | - |
item.contributor | Kittl, J.A. | - |
item.contributor | MULLENS, Jules | - |
item.validation | ecoom 2010 | - |
item.fulltext | With Fulltext | - |
item.accessRights | Open Access | - |
item.fullcitation | HARDY, An; Adelmann, C.; Van Elshocht, S.; VAN DEN RUL, Heidi; VAN BAEL, Marlies; De Gendt, S.; D'OLIESLAEGER, Marc; Heyns, M.; Kittl, J.A. & MULLENS, Jules (2009) Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy. In: APPLIED SURFACE SCIENCE, 255(17). p. 7812-7817. | - |
crisitem.journal.issn | 0169-4332 | - |
crisitem.journal.eissn | 1873-5584 | - |
Appears in Collections: | Research publications |
SCOPUSTM
Citations
33
checked on Sep 2, 2020
WEB OF SCIENCETM
Citations
35
checked on Oct 13, 2024
Page view(s)
66
checked on Aug 31, 2022
Download(s)
206
checked on Aug 31, 2022
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.