Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/9874
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dc.contributor.authorKulha, P.-
dc.contributor.authorKromka, A.-
dc.contributor.authorBabchenko, Oleg-
dc.contributor.authorVanecek, M.-
dc.contributor.authorHusak, M.-
dc.contributor.authorWILLIAMS, Oliver-
dc.contributor.authorHAENEN, Ken-
dc.date.accessioned2009-10-07T08:19:33Z-
dc.date.availableNO_RESTRICTION-
dc.date.issued2009-
dc.identifier.citationVACUUM, 84(1). p. 53-56-
dc.identifier.issn0042-207X-
dc.identifier.urihttp://hdl.handle.net/1942/9874-
dc.description.abstractThe design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) films are reported. The CoventorWare FEM calculations of the mechanical stress and geometrical deformations of a 3-D structure are used for a proper localization of the piezoresistor on the carrying substrate. The boron-doped piezoresistive sensing element was realized using a directed patterned growth of NCD film on SiO2/Si by microwave plasma-enhanced chemical vapour deposition (CVD). The gauge factor of borondoped NCD films was investigated in the range from room temperature up to 200 C and from 0 to 5 N of the applied force. These NCD piezoresistive sensor elements are compared with a Silicon-on-Insulator (SOI) based piezoresistive sensor and their high-temperature applications are discussed.-
dc.description.sponsorshipThe authors acknowledge the support by the Ministry of Education of the Czech Republic (grant MSM6840770015), the Research Programs G.0068.07 and G.0430.07 of the Research Foundation – Flanders (FWO), the Methusalem ‘‘NANO network’’, and the Belgian IAP-P6/42 project ‘Quantum Effects in Clusters and Nanowires’.-
dc.language.isoen-
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD, THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND-
dc.subject.otherVAPOR-DEPOSITED DIAMOND; FILMS-
dc.titleNanocrystalline diamond piezoresistive sensor-
dc.typeJournal Contribution-
dc.identifier.epage56-
dc.identifier.issue1-
dc.identifier.spage53-
dc.identifier.volume84-
local.bibliographicCitation.jcatA1-
dc.description.notesAddresses: 1. Czech Tech Univ, Prague 16627, Czech Republic 2. ASCR, Inst Phys, Prague 16200, Czech Republic 3. Hasselt Univ, Inst Mat Res, IMO, B-3590 Diepenbeek, Belgium 4. IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium E-mail Addresses: kulhap@fel.cvut.cz-
local.type.refereedRefereed-
local.type.specifiedArticle-
dc.bibliographicCitation.oldjcatA1-
dc.identifier.doi10.1016/j.vacuum.2009.04.023-
dc.identifier.isi000270625900012-
item.validationecoom 2010-
item.contributorKulha, P.-
item.contributorKromka, A.-
item.contributorBabchenko, Oleg-
item.contributorVanecek, M.-
item.contributorHusak, M.-
item.contributorWILLIAMS, Oliver-
item.contributorHAENEN, Ken-
item.accessRightsClosed Access-
item.fullcitationKulha, P.; Kromka, A.; Babchenko, Oleg; Vanecek, M.; Husak, M.; WILLIAMS, Oliver & HAENEN, Ken (2009) Nanocrystalline diamond piezoresistive sensor. In: VACUUM, 84(1). p. 53-56.-
item.fulltextNo Fulltext-
crisitem.journal.issn0042-207X-
crisitem.journal.eissn1879-2715-
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