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http://hdl.handle.net/1942/9874
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DC Field | Value | Language |
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dc.contributor.author | Kulha, P. | - |
dc.contributor.author | Kromka, A. | - |
dc.contributor.author | Babchenko, Oleg | - |
dc.contributor.author | Vanecek, M. | - |
dc.contributor.author | Husak, M. | - |
dc.contributor.author | WILLIAMS, Oliver | - |
dc.contributor.author | HAENEN, Ken | - |
dc.date.accessioned | 2009-10-07T08:19:33Z | - |
dc.date.available | NO_RESTRICTION | - |
dc.date.issued | 2009 | - |
dc.identifier.citation | VACUUM, 84(1). p. 53-56 | - |
dc.identifier.issn | 0042-207X | - |
dc.identifier.uri | http://hdl.handle.net/1942/9874 | - |
dc.description.abstract | The design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) films are reported. The CoventorWare FEM calculations of the mechanical stress and geometrical deformations of a 3-D structure are used for a proper localization of the piezoresistor on the carrying substrate. The boron-doped piezoresistive sensing element was realized using a directed patterned growth of NCD film on SiO2/Si by microwave plasma-enhanced chemical vapour deposition (CVD). The gauge factor of borondoped NCD films was investigated in the range from room temperature up to 200 C and from 0 to 5 N of the applied force. These NCD piezoresistive sensor elements are compared with a Silicon-on-Insulator (SOI) based piezoresistive sensor and their high-temperature applications are discussed. | - |
dc.description.sponsorship | The authors acknowledge the support by the Ministry of Education of the Czech Republic (grant MSM6840770015), the Research Programs G.0068.07 and G.0430.07 of the Research Foundation – Flanders (FWO), the Methusalem ‘‘NANO network’’, and the Belgian IAP-P6/42 project ‘Quantum Effects in Clusters and Nanowires’. | - |
dc.language.iso | en | - |
dc.publisher | PERGAMON-ELSEVIER SCIENCE LTD, THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND | - |
dc.subject.other | VAPOR-DEPOSITED DIAMOND; FILMS | - |
dc.title | Nanocrystalline diamond piezoresistive sensor | - |
dc.type | Journal Contribution | - |
dc.identifier.epage | 56 | - |
dc.identifier.issue | 1 | - |
dc.identifier.spage | 53 | - |
dc.identifier.volume | 84 | - |
local.bibliographicCitation.jcat | A1 | - |
dc.description.notes | Addresses: 1. Czech Tech Univ, Prague 16627, Czech Republic 2. ASCR, Inst Phys, Prague 16200, Czech Republic 3. Hasselt Univ, Inst Mat Res, IMO, B-3590 Diepenbeek, Belgium 4. IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium E-mail Addresses: kulhap@fel.cvut.cz | - |
local.type.refereed | Refereed | - |
local.type.specified | Article | - |
dc.bibliographicCitation.oldjcat | A1 | - |
dc.identifier.doi | 10.1016/j.vacuum.2009.04.023 | - |
dc.identifier.isi | 000270625900012 | - |
item.contributor | Kulha, P. | - |
item.contributor | Kromka, A. | - |
item.contributor | Babchenko, Oleg | - |
item.contributor | Vanecek, M. | - |
item.contributor | Husak, M. | - |
item.contributor | WILLIAMS, Oliver | - |
item.contributor | HAENEN, Ken | - |
item.fullcitation | Kulha, P.; Kromka, A.; Babchenko, Oleg; Vanecek, M.; Husak, M.; WILLIAMS, Oliver & HAENEN, Ken (2009) Nanocrystalline diamond piezoresistive sensor. In: VACUUM, 84(1). p. 53-56. | - |
item.accessRights | Closed Access | - |
item.fulltext | No Fulltext | - |
item.validation | ecoom 2010 | - |
crisitem.journal.issn | 0042-207X | - |
crisitem.journal.eissn | 1879-2715 | - |
Appears in Collections: | Research publications |
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