CARLEER, Robert

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Full Name
CARLEER, Robert
Email
robert.carleer@uhasselt.be
 
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Publications

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Date Issued:  [2000 TO 2022]
Internal UHasselt:  ADRIAENSENS, Peter
Author:  Lux, M.
Type:  Journal Contribution

Results 1-2 of 2 (Search time: 0.001 seconds).

Issue DateTitleContributor(s)TypeCat.
12013An environment friendly wet strip process for 193 nm lithography patterning in BEOL applicationsVereecke, G.; KESTERS, Els; Le, Q. T.; CLAES, Monica; Lux, M.; Struyf, H.; CARLEER, Robert; ADRIAENSENS, PeterJournal ContributionA1
22008Chemical and structural modifications in a 193-nm photoresist after low-k dry etchKESTERS, Els; Claes, M.; Le, Q.T.; Lux, M.; Franquet, A.; Vereecke, G.; Mertens, P.W.; Frank, M.M.; CARLEER, Robert; ADRIAENSENS, Peter; Biebuyk, J.J.; Bebelman, S.Journal ContributionA1