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http://hdl.handle.net/1942/11111
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DC Field | Value | Language |
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dc.contributor.author | Adelmann, Christoph | - |
dc.contributor.author | Pierreux, Dieter | - |
dc.contributor.author | Swerts, Johan | - |
dc.contributor.author | DEWULF, Daan | - |
dc.contributor.author | HARDY, An | - |
dc.contributor.author | TIELENS, Hilde | - |
dc.contributor.author | Franquet, Alexis | - |
dc.contributor.author | Brijs, Bert | - |
dc.contributor.author | Moussa, Alain | - |
dc.contributor.author | Conard, Thierry | - |
dc.contributor.author | VAN BAEL, Marlies | - |
dc.contributor.author | Maes, Jan W. | - |
dc.contributor.author | Jurczak, Malgorzata | - |
dc.contributor.author | Kittl, Jorge A. | - |
dc.contributor.author | Van Elshocht, Sven | - |
dc.date.accessioned | 2010-09-06T07:17:58Z | - |
dc.date.available | NO_RESTRICTION | - |
dc.date.available | 2010-09-06T07:17:58Z | - |
dc.date.issued | 2010 | - |
dc.identifier.citation | CHEMICAL VAPOR DEPOSITION, 16 (4-6). p. 170-178 | - |
dc.identifier.issn | 0948-1907 | - |
dc.identifier.uri | http://hdl.handle.net/1942/11111 | - |
dc.description.abstract | For future generations of non-volatile memory applications, the replacement of the interpoly dielectric by a suitable high-K material is required. Rare-earth aluminates are potential candidates because they are predicted to combine a high dielectric permittivity with a large band gap. We demonstrate the atomic layer deposition (ALD) of GdxAl2O3 layers using Gd((PrCp)-Pr-i)(3), trimethyl-aluminum (TMA), and H2O or O-3. Process windows for both H2O and O3 as oxidants are explored. H2O is shown to lead to better GdxAl2-xO3 film properties than O-3, although the accessible composition range is limited because of the hygroscopic nature of Gd2O3. | - |
dc.description.sponsorship | An Hardy is a postdoctoral research fellow of the Research Foundation-Flanders (FWO-Vlaanderen). Daan Dewulf is funded by a Ph.D. grant of the Institute for the Promotion of Innovation through Science and Technology in Flanders (IWT-Vlaanderen). | - |
dc.language.iso | en | - |
dc.publisher | WILEY-V C H VERLAG GMBH | - |
dc.subject.other | ALD; Cyclopentadienyl; Gadolinium aluminate; Gadolinium oxide; High-kappa oxides | - |
dc.title | Atomic Layer Deposition of Gadolinium Aluminate using Gd((PrCp)-Pr-i)(3), TMA, and O-3 or H2O | - |
dc.type | Journal Contribution | - |
dc.identifier.epage | 178 | - |
dc.identifier.issue | 4-6 | - |
dc.identifier.spage | 170 | - |
dc.identifier.volume | 16 | - |
local.format.pages | 9 | - |
local.bibliographicCitation.jcat | A1 | - |
dc.description.notes | [Adelmann, Christoph; Swerts, Johan; Tielens, Hilde; Franquet, Alexis; Brijs, Bert; Moussa, Alain; Conard, Thierry; Jurczak, Malgorzata; Kittl, Jorge A.; Van Elshocht, Sven] IMEC VZW, B-3001 Louvain, Belgium. [Pierreux, Dieter; Maes, Jan W.] ASM Belgium, B-3001 Louvain, Belgium. [Dewulf, Dann; Hardy, An; Van Bael, Marlies K.] Hasselt Univ, Inst Mat Res Inorgan & Phys Chem, B-3590 Diepenbeek, Belgium. [Dewulf, Dann; Hardy, An; Van Bael, Marlies K.] IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium. adelmann@imec.be | - |
local.type.refereed | Refereed | - |
local.type.specified | Article | - |
dc.bibliographicCitation.oldjcat | A1 | - |
dc.identifier.doi | 10.1002/cvde.200906833 | - |
dc.identifier.isi | 000279984800008 | - |
item.fullcitation | Adelmann, Christoph; Pierreux, Dieter; Swerts, Johan; DEWULF, Daan; HARDY, An; TIELENS, Hilde; Franquet, Alexis; Brijs, Bert; Moussa, Alain; Conard, Thierry; VAN BAEL, Marlies; Maes, Jan W.; Jurczak, Malgorzata; Kittl, Jorge A. & Van Elshocht, Sven (2010) Atomic Layer Deposition of Gadolinium Aluminate using Gd((PrCp)-Pr-i)(3), TMA, and O-3 or H2O. In: CHEMICAL VAPOR DEPOSITION, 16 (4-6). p. 170-178. | - |
item.contributor | Adelmann, Christoph | - |
item.contributor | Pierreux, Dieter | - |
item.contributor | Swerts, Johan | - |
item.contributor | DEWULF, Daan | - |
item.contributor | HARDY, An | - |
item.contributor | TIELENS, Hilde | - |
item.contributor | Franquet, Alexis | - |
item.contributor | Brijs, Bert | - |
item.contributor | Moussa, Alain | - |
item.contributor | Conard, Thierry | - |
item.contributor | VAN BAEL, Marlies | - |
item.contributor | Maes, Jan W. | - |
item.contributor | Jurczak, Malgorzata | - |
item.contributor | Kittl, Jorge A. | - |
item.contributor | Van Elshocht, Sven | - |
item.validation | ecoom 2011 | - |
item.accessRights | Restricted Access | - |
item.fulltext | With Fulltext | - |
crisitem.journal.issn | 0948-1907 | - |
Appears in Collections: | Research publications |
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adelmann.pdf Restricted Access | Published version | 572.58 kB | Adobe PDF | View/Open Request a copy |
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