Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/11119| Title: | Texture of atomic layer deposited ruthenium | Authors: | Musschoot, J. Xie, Q. Deduytsche, D. De Keyser, K. Longrie, D. Haemers, J. Van den Berghe, S. Van Meirhaeghe, R. L. D'HAEN, Jan Detavernier, C. |
Issue Date: | 2010 | Publisher: | ELSEVIER SCIENCE BV | Source: | MICROELECTRONIC ENGINEERING, 87(10). p. 1879-1883 | Abstract: | Ruthenium films were grown by plasma enhanced atomic layer deposition (ALD) on Si(1 0 0) and ALD TiN. X-ray diffraction (XRD) showed that the as-deposited films on Si(1 0 0) were polycrystalline, on TiN they were (0 0 2) oriented. After annealing at 800 degrees C for 60 s, all Ru films were strongly (0 0 2) textured and very smooth. Electron backscatter diffraction (EBSD) and transmission electron microscopy (TEM) demonstrated that the lateral grain size of the annealed films was several 100 nm, which was large compared to the 10 nni thickness of the films. No ruthenium silicide was formed by annealing the ALD Ru films on Si(1 00). Comparison with sputter deposited films learned that this occurred because the ammonia plasma created a SiOxNy reaction barrier layer prior to film growth. (C) 2009 Elsevier B.V. All rights reserved. | Notes: | [Musschoot, J.; Deduytsche, D.; De Keyser, K.; Longrie, D.; Haemers, J.; Van Meirhaeghe, R. L.; Detavernier, C.] Univ Ghent, Dept Solid State Sci, B-9000 Ghent, Belgium. [Xie, Q.] Fudan Univ, Dept Microelect, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China. [Van den Berghe, S.] CEN SCK, Lab High & Medium Act, B-2400 Mol, Belgium. [D'Haen, J.] Hasselt Univ, IMO IMOMEC, B-3590 Diepenbeek, Belgium. jan.musschoot@ugent.be; christophe.detavernier@ugent.be | Keywords: | Ruthenium; Atomic layer deposition; Texture; Silicide; Ammonia plasma | Document URI: | http://hdl.handle.net/1942/11119 | ISSN: | 0167-9317 | e-ISSN: | 1873-5568 | DOI: | 10.1016/j.mee.2009.11.020 | ISI #: | 000280046900012 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2011 |
| Appears in Collections: | Research publications |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| d'haen.pdf Restricted Access | Published version | 501.56 kB | Adobe PDF | View/Open Request a copy |
SCOPUSTM
Citations
13
checked on Sep 3, 2020
WEB OF SCIENCETM
Citations
14
checked on Apr 22, 2024
Page view(s)
106
checked on Sep 7, 2022
Download(s)
96
checked on Sep 7, 2022
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.