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Title: | Capacitive field-effect (bio-)chemical sensors based on nanocrystalline diamond films | Authors: | BACKER, Matthias Poghossian, Arshak Abouzar, Maryam H. WENMACKERS, Sylvia JANSSENS, Stoffel HAENEN, Ken WAGNER, Patrick Schöning, M.J. |
Issue Date: | 2010 | Publisher: | MATERIALS RESEARCH SOCIETY | Source: | Bergonzo, Philippe & Butler, James E. & Jackman, Richard B. & Loh, Kian Ping & Nesládek, Milos (Ed.) DIAMOND ELECTRONICS - FUNDAMENTALS TO APPLICATIONS III. p. 173-178. | Series/Report: | MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS | Series/Report no.: | 1203 | Abstract: | Capacitive field-effect electrolyte-diamond-insulator-semiconductor (EDIS) structures with Oterminated nanocrystalline diamond (NCD) as sensitive gate material have been realized and investigated for the detection of pH, penicillin concentration, and layer-by-layer adsorption of polyelectrolytes. The surface oxidizing procedure of NCD thin films as well as the seeding and NCD growth process on a Si-SiO2 substrate have been improved to provide high pH-sensitive, non-porous thin films without damage of the underlying SiO2 layer and with a high coverage of O-terminated sites. The NCD surface topography, roughness, and coverage of the surface groups have been characterized by SEM, AFM and XPS methods. The EDIS sensors with O-terminated NCD film treated in oxidizing boiling mixture for 45 min show a pH sensitivity of about 50 mV/pH. The pH-sensitive properties of the NCD have been used to develop an EDIS-based penicillin biosensor with high sensitivity (65-70 mV/decade in the concentration range of 0.25- 2.5 mM penicillin G) and low detection limit (5 μM). The results of label-free electrical detection of layer-by-layer adsorption of charged polyelectrolytes are presented, too. | Document URI: | http://hdl.handle.net/1942/11570 | ISBN: | 978-1-60511-176-6 | DOI: | 10.1557/PROC-1203-J17-31 | Category: | C1 | Type: | Proceedings Paper |
Appears in Collections: | Research publications |
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Article MRS Fall 2009-Matthias.pdf | Published version | 219.95 kB | Adobe PDF | View/Open |
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