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|Title:||Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in situ capping||Authors:||Swerts, J.
VAN BAEL, Marlies
Van Elshocht, S.
|Issue Date:||2011||Publisher:||AMER INST PHYSICS||Source:||APPLIED PHYSICS LETTERS, 98(10)||Abstract:||We have studied the effect of air exposure on lanthanum aluminates (LaAlOx) deposited by atomic layer deposition. Fourier transform infrared spectroscopy and thermal desorption spectroscopy of as-deposited LaAlOx showed that H2O is absorbed during air exposure and that the amount of absorbed H2O increases with increasing La atomic percent. C was found to be incorporated already during deposition in the form of carbonates. H2O and CO2 are outgassed during postdeposition annealing in an inert atmosphere. After a 700 degrees C postdeposition anneal, the LaAlOx becomes resistant against H2O absorption due to film densification. Alternatively, in situ capping of the LaAlOx with a similar to 2 nm thin Al2O3 film protects the LaAlOx against H2O absorption, but it also hinders the outgassing of the C contaminants during a postdeposition anneal. (C) 2011 American Institute of Physics. [doi:10.1063/1.3557501]||Notes:||[Swerts, J.; Gielis, S.; Vereecke, G.; Adelmann, C.; Van Elshocht, S.] IMEC VZW, B-3001 Louvain, Belgium. [Gielis, S.] Katholieke Univ Leuven, Dept Chem, B-3001 Louvain, Belgium. [Hardy, A.; Dewulf, D.; Van Bael, M. K.] Hasselt Univ, IMO, Div IMOMEC, B-3590 Diepenbeek, Belgium. [Hardy, A.; Dewulf, D.; Van Bael, M. K.] Hasselt Univ, IMEC, Div IMOMEC, B-3590 Diepenbeek, Belgium.||Document URI:||http://hdl.handle.net/1942/11862||ISSN:||0003-6951||e-ISSN:||1077-3118||DOI:||10.1063/1.3557501||ISI #:||000288277200058||Category:||A1||Type:||Journal Contribution||Validations:||ecoom 2012|
|Appears in Collections:||Research publications|
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