Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/11862
Title: Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in situ capping
Authors: Swerts, J.
GIELIS, Sven 
Vereecke, G.
HARDY, An 
DEWULF, Daan 
Adelmann, C.
VAN BAEL, Marlies 
Van Elshocht, S.
Issue Date: 2011
Publisher: AMER INST PHYSICS
Source: APPLIED PHYSICS LETTERS, 98(10)
Abstract: We have studied the effect of air exposure on lanthanum aluminates (LaAlOx) deposited by atomic layer deposition. Fourier transform infrared spectroscopy and thermal desorption spectroscopy of as-deposited LaAlOx showed that H2O is absorbed during air exposure and that the amount of absorbed H2O increases with increasing La atomic percent. C was found to be incorporated already during deposition in the form of carbonates. H2O and CO2 are outgassed during postdeposition annealing in an inert atmosphere. After a 700 degrees C postdeposition anneal, the LaAlOx becomes resistant against H2O absorption due to film densification. Alternatively, in situ capping of the LaAlOx with a similar to 2 nm thin Al2O3 film protects the LaAlOx against H2O absorption, but it also hinders the outgassing of the C contaminants during a postdeposition anneal. (C) 2011 American Institute of Physics. [doi:10.1063/1.3557501]
Notes: [Swerts, J.; Gielis, S.; Vereecke, G.; Adelmann, C.; Van Elshocht, S.] IMEC VZW, B-3001 Louvain, Belgium. [Gielis, S.] Katholieke Univ Leuven, Dept Chem, B-3001 Louvain, Belgium. [Hardy, A.; Dewulf, D.; Van Bael, M. K.] Hasselt Univ, IMO, Div IMOMEC, B-3590 Diepenbeek, Belgium. [Hardy, A.; Dewulf, D.; Van Bael, M. K.] Hasselt Univ, IMEC, Div IMOMEC, B-3590 Diepenbeek, Belgium.
Document URI: http://hdl.handle.net/1942/11862
ISSN: 0003-6951
e-ISSN: 1077-3118
DOI: 10.1063/1.3557501
ISI #: 000288277200058
Category: A1
Type: Journal Contribution
Validations: ecoom 2012
Appears in Collections:Research publications

Show full item record

SCOPUSTM   
Citations

10
checked on Sep 3, 2020

WEB OF SCIENCETM
Citations

11
checked on Nov 24, 2022

Page view(s)

52
checked on Sep 6, 2022

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.