Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/13791
Title: Gadolinium -niobates and -tantalates: Amorphous High-k Materials by Aqueous CSD
Authors: DEWULF, Daan 
HARDY, An 
Van Elshocht, S.
DE DOBBELAERE, Christopher 
Wang, W. C.
Badylevich, M.
Afanas'ev, V. V.
De Gendt, S.
VAN BAEL, Marlies 
Issue Date: 2012
Publisher: ELECTROCHEMICAL SOC INC
Source: JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 159 (6), p. G75-G79
Abstract: In this work, compositional series of Gd-Nb-oxides and Gd-Ta-oxides are investigated as new potential high-k materials. Ultrathin oxide films in the range of 5-25 nm are deposited by spincoating. XRD and AFM show that the films are amorphous and smooth (RMS < 1 nm). Dielectric constants are derived from capacitance voltage (CV) measurements and EOT extraction. K values of the Gd-Nb-Ox series range from 13-16 while higher k values are obtained for the Gd-Ta-Ox series ranging from 15-19. For the Gd-Nb-Ox series, a higher k value is obtained for the most Gd-rich composition, while the opposite trend for the Gd-Ta-Ox series is noticed. Furthermore, the Gd-Ta-Ox shows the lowest leakages, as concluded from current-voltage (IV) measurements. A higher Gd content leads to decreased leakage, concurrent with increased band gaps.
Notes: [Dewulf, D.; Hardy, A.; De Dobbelaere, C.; Van Bael, M. K.] Hasselt Univ, Inorgan & Phys Chem IMO, B-3590 Diepenbeek, Belgium. [Dewulf, D.; Hardy, A.; Van Bael, M. K.] IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium. [Van Elshocht, S.; De Gendt, S.] IMEC VZW, B-3001 Heverlee, Belgium. [Wang, W. C.; Badylevich, M.; Afanas'ev, V. V.] Univ Leuven, Semicond Phys Lab, Dept Phys & Astron, B-3001 Heverlee, Belgium. [De Gendt, S.] KULeuven, Dept Chem, B-3001 Heverlee, Belgium.
Keywords: Electrochemistry; Materials Science, Coatings & Films
Document URI: http://hdl.handle.net/1942/13791
ISSN: 0013-4651
e-ISSN: 1945-7111
DOI: 10.1149/2.072206jes
ISI #: 000304140700067
Category: A1
Type: Journal Contribution
Validations: ecoom 2013
Appears in Collections:Research publications

Show full item record

SCOPUSTM   
Citations

4
checked on Sep 2, 2020

WEB OF SCIENCETM
Citations

2
checked on May 21, 2022

Page view(s)

60
checked on May 27, 2022

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.