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Title: | Gadolinium -niobates and -tantalates: Amorphous High-k Materials by Aqueous CSD | Authors: | DEWULF, Daan HARDY, An Van Elshocht, S. DE DOBBELAERE, Christopher Wang, W. C. Badylevich, M. Afanas'ev, V. V. De Gendt, S. VAN BAEL, Marlies |
Issue Date: | 2012 | Publisher: | ELECTROCHEMICAL SOC INC | Source: | JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 159 (6), p. G75-G79 | Abstract: | In this work, compositional series of Gd-Nb-oxides and Gd-Ta-oxides are investigated as new potential high-k materials. Ultrathin oxide films in the range of 5-25 nm are deposited by spincoating. XRD and AFM show that the films are amorphous and smooth (RMS < 1 nm). Dielectric constants are derived from capacitance voltage (CV) measurements and EOT extraction. K values of the Gd-Nb-Ox series range from 13-16 while higher k values are obtained for the Gd-Ta-Ox series ranging from 15-19. For the Gd-Nb-Ox series, a higher k value is obtained for the most Gd-rich composition, while the opposite trend for the Gd-Ta-Ox series is noticed. Furthermore, the Gd-Ta-Ox shows the lowest leakages, as concluded from current-voltage (IV) measurements. A higher Gd content leads to decreased leakage, concurrent with increased band gaps. | Notes: | [Dewulf, D.; Hardy, A.; De Dobbelaere, C.; Van Bael, M. K.] Hasselt Univ, Inorgan & Phys Chem IMO, B-3590 Diepenbeek, Belgium. [Dewulf, D.; Hardy, A.; Van Bael, M. K.] IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium. [Van Elshocht, S.; De Gendt, S.] IMEC VZW, B-3001 Heverlee, Belgium. [Wang, W. C.; Badylevich, M.; Afanas'ev, V. V.] Univ Leuven, Semicond Phys Lab, Dept Phys & Astron, B-3001 Heverlee, Belgium. [De Gendt, S.] KULeuven, Dept Chem, B-3001 Heverlee, Belgium. | Keywords: | Electrochemistry; Materials Science, Coatings & Films | Document URI: | http://hdl.handle.net/1942/13791 | ISSN: | 0013-4651 | e-ISSN: | 1945-7111 | DOI: | 10.1149/2.072206jes | ISI #: | 000304140700067 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2013 |
Appears in Collections: | Research publications |
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