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Title: | Thickness dependent residual stress in sputtered AlN thin films | Authors: | POBEDINSKAS, Paulius BOLSEE, Jean-Christophe DEXTERS, Wim RUTTENS, Bart MORTET, Vincent D'HAEN, Jan MANCA, Jean HAENEN, Ken |
Issue Date: | 2012 | Publisher: | ELSEVIER SCIENCE SA | Source: | THIN SOLID FILMS, 522, p. 180-185 | Abstract: | Thin aluminium nitride (AIN) films of different thickness are deposited by DC-pulsed magnetron sputtering under identical conditions on sapphire (0001) and silicon (100) substrates. An investigation of the residual stress, morphology and structural properties is carried out. The thickness of the films covers the range from 17 nm to 3.9 μm. A higher compressive residual stress is measured for the thinner films and the presence of a stress gradient is proven. X-ray diffraction (XRD) studies show that all AIN films are achieved with perfect c-axis orientation perpendicular to the film surface and that the films are biaxially strained. XRD rocking curves reveal that AIN films on sapphire are highly oriented for all film thicknesses, whereas AIN film growth on silicon starts highly disoriented and the film quality improves with film thickness. Surface analysis by atomic force microscopy shows a continuous film roughening and decrease of grain boundary density with increasing film thickness. | Notes: | [Pobedinskas, Paulius; Bolsee, Jean-Christophe; Dexters, Wim; Ruttens, Bart; Mortet, Vincent; D'Haen, Jan; Manca, Jean V.; Haenen, Ken] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Ruttens, Bart; Mortet, Vincent; D'Haen, Jan; Manca, Jean V.; Haenen, Ken] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. [Mortet, Vincent] Univ Toulouse, CNRS, LAAS, F-31077 Toulouse, France. | Keywords: | Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter; residual stress; physical vapor deposition; aluminium nitride; AIN;Residual stress; Physical vapor deposition; Aluminum nitride; AlN | Document URI: | http://hdl.handle.net/1942/14442 | ISSN: | 0040-6090 | e-ISSN: | 1879-2731 | DOI: | 10.1016/j.tsf.2012.08.015 | ISI #: | 000310782000035 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2013 |
Appears in Collections: | Research publications |
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