Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/14778
Title: Hydrogen behaviour in amorphous Si/Ge nano-structures after annealing
Authors: Frigeri, C.
Serenyi, M.
Khanh, N. Q.
Csik, A.
Nasi, L.
Erdelyi, Z.
Beke, D. L.
BOYEN, Hans-Gerd 
Issue Date: 2013
Publisher: ELSEVIER SCIENCE BV
Source: APPLIED SURFACE SCIENCE, 267, p. 30-34
Abstract: The relationship between blistering, H content and de-passivation of the dangling bonds has been studied in annealed hydrogenated a-Si/a-Ge superlattice (SL) nanostructures grown by RF sputtering. Measurements have been carried out by ERDA, IR absorbance and AFM. By comparison with parallel investigations on a-Si and a-Ge single layers it has been established that the bubbles causing blistering in the annealed SLs very likely start to grow in the Ge layers of the SL because H is released from Ge much earlier than from Si. It is shown that the H forming the bubbles is only a fraction of the H liberated during the annealing. (C) 2012 Elsevier B. V. All rights reserved.
Notes: [Frigeri, C.; Nasi, L.] CNR IMEM Inst, I-43100 Parma, Italy. [Serenyi, M.; Khanh, N. Q.] Hungarian Acad Sci, Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary. [Csik, A.] Hungarian Acad Sci, Inst Nucl Res, H-4001 Debrecen, Hungary. [Erdelyi, Z.; Beke, D. L.] Univ Debrecen, Dept Solid State Phys, H-4010 Debrecen, Hungary. [Boyen, H. -G.] Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium.
Keywords: Amorphous Si/Ge superlattice; Hydrogen; Annealing; Nanostructure; Blistering;Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter
Document URI: http://hdl.handle.net/1942/14778
ISSN: 0169-4332
e-ISSN: 1873-5584
DOI: 10.1016/j.apsusc.2012.05.030
ISI #: 000314881900008
Category: A1
Type: Journal Contribution
Validations: ecoom 2014
Appears in Collections:Research publications

Files in This Item:
File Description SizeFormat 
frigeri 1.pdf
  Restricted Access
article594.43 kBAdobe PDFView/Open    Request a copy
Show full item record

SCOPUSTM   
Citations

8
checked on Sep 2, 2020

WEB OF SCIENCETM
Citations

8
checked on May 22, 2022

Page view(s)

44
checked on May 20, 2022

Download(s)

40
checked on May 20, 2022

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.