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http://hdl.handle.net/1942/1485
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DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kirsch, P. | - |
dc.contributor.author | Assouar, Mohamed B. | - |
dc.contributor.author | Elmazria, O. | - |
dc.contributor.author | MORTET, Vincent | - |
dc.contributor.author | Alnot, P. | - |
dc.date.accessioned | 2007-05-11T09:00:56Z | - |
dc.date.available | 2007-05-11T09:00:56Z | - |
dc.date.issued | 2006 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, 88(22). p. 223504-... | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/1942/1485 | - |
dc.description.abstract | Very high frequency surface acoustic wave (SAW) devices based on AlN/diamond layered structures were fabricated by direct writing using e-beam lithography on the nucleation side of chemical vapor deposition diamond. The interdigital transducers made in aluminum with resolutions down to 500 nm were patterned on AlN/diamond layered structure with an adapted technological process. Experimental results show that the Rayleigh wave and the higher modes are generated. The fundamental frequency around 5 GHz was obtained for this layered structure SAW device and agrees well with calculated results from dispersion curves of propagation velocity and electromechanical coupling coefficient. | - |
dc.language.iso | en | - |
dc.publisher | AIP | - |
dc.subject.other | CVD DIAMOND; FILTERS; FILMS | - |
dc.title | 5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography | - |
dc.type | Journal Contribution | - |
dc.identifier.issue | 22 | - |
dc.identifier.spage | 223504 | - |
dc.identifier.volume | 88 | - |
local.bibliographicCitation.jcat | A1 | - |
local.type.refereed | Refereed | - |
local.type.specified | Article | - |
dc.bibliographicCitation.oldjcat | A1 | - |
dc.identifier.doi | 10.1063/1.2208372 | - |
dc.identifier.isi | 000238001900084 | - |
item.fullcitation | Kirsch, P.; Assouar, Mohamed B.; Elmazria, O.; MORTET, Vincent & Alnot, P. (2006) 5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography. In: APPLIED PHYSICS LETTERS, 88(22). p. 223504-.... | - |
item.fulltext | No Fulltext | - |
item.validation | ecoom 2007 | - |
item.contributor | Kirsch, P. | - |
item.contributor | Assouar, Mohamed B. | - |
item.contributor | Elmazria, O. | - |
item.contributor | MORTET, Vincent | - |
item.contributor | Alnot, P. | - |
item.accessRights | Closed Access | - |
crisitem.journal.issn | 0003-6951 | - |
crisitem.journal.eissn | 1077-3118 | - |
Appears in Collections: | Research publications |
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