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http://hdl.handle.net/1942/1485
Title: | 5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography | Authors: | Kirsch, P. Assouar, Mohamed B. Elmazria, O. MORTET, Vincent Alnot, P. |
Issue Date: | 2006 | Publisher: | AIP | Source: | APPLIED PHYSICS LETTERS, 88(22). p. 223504-... | Abstract: | Very high frequency surface acoustic wave (SAW) devices based on AlN/diamond layered structures were fabricated by direct writing using e-beam lithography on the nucleation side of chemical vapor deposition diamond. The interdigital transducers made in aluminum with resolutions down to 500 nm were patterned on AlN/diamond layered structure with an adapted technological process. Experimental results show that the Rayleigh wave and the higher modes are generated. The fundamental frequency around 5 GHz was obtained for this layered structure SAW device and agrees well with calculated results from dispersion curves of propagation velocity and electromechanical coupling coefficient. | Keywords: | CVD DIAMOND; FILTERS; FILMS | Document URI: | http://hdl.handle.net/1942/1485 | ISSN: | 0003-6951 | e-ISSN: | 1077-3118 | DOI: | 10.1063/1.2208372 | ISI #: | 000238001900084 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2007 |
Appears in Collections: | Research publications |
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