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Title: | Surface plasma pretreatment for enhanced diamond nucleation on AlN | Authors: | POBEDINSKAS, Paulius DEGUTIS, Giedrius DEXTERS, Wim JANSSEN, Wiebke JANSSENS, Stoffel CONINGS, Bert RUTTENS, Bart D'HAEN, Jan BOYEN, Hans-Gerd HARDY, An VAN BAEL, Marlies HAENEN, Ken |
Issue Date: | 2013 | Publisher: | AMER INST PHYSICS | Source: | APPLIED PHYSICS LETTERS, 102 (20), p. 201609 | Abstract: | The surface of polycrystalline aluminum nitride (AlN) thin films is exposed to different gas discharge plasmas (N-2, O-2, and CF4) followed by a water-based colloidal seeding of ultra-dispersed nanodiamond particles. Fluorination of the AlN surface enhances the seeding density, whereas the oxidized surface does not yield any nucleation sites. In the former case, the seeding density improves by almost three orders of magnitude as compared to the untreated and N-2 pretreated samples, and allows to grow pinhole-free nanocrystalline diamond film on AlN. Finally, we demonstrate a route towards selective diamond growth on AlN thin films by employing CF4 plasma pretreatment together with photolithography. (C) 2013 AIP Publishing LLC. | Notes: | [Pobedinskas, P.; Degutis, G.; Dexters, W.; Janssen, W.; Janssens, S. D.; Conings, B.; Ruttens, B.; D'Haen, J.; Boyen, H. -G.; Hardy, A.; Van Bael, M. K.; Haenen, K.] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Pobedinskas, P.; Janssen, W.; Janssens, S. D.; Ruttens, B.; D'Haen, J.; Boyen, H. -G.; Hardy, A.; Van Bael, M. K.; Haenen, K.] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. paulius.pobedinskas@uhasselt.be; ken.haenen@uhasselt.be | Keywords: | Physics, Applied | Document URI: | http://hdl.handle.net/1942/15379 | ISSN: | 0003-6951 | e-ISSN: | 1077-3118 | DOI: | 10.1063/1.4807591 | ISI #: | 000320619300030 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2014 |
Appears in Collections: | Research publications |
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surface 1.pdf | Published version | 1.23 MB | Adobe PDF | View/Open |
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