Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/15379
Title: Surface plasma pretreatment for enhanced diamond nucleation on AlN
Authors: POBEDINSKAS, Paulius 
DEGUTIS, Giedrius 
DEXTERS, Wim 
JANSSEN, Wiebke 
JANSSENS, Stoffel 
CONINGS, Bert 
RUTTENS, Bart 
D'HAEN, Jan 
BOYEN, Hans-Gerd 
HARDY, An 
VAN BAEL, Marlies 
HAENEN, Ken 
Issue Date: 2013
Publisher: AMER INST PHYSICS
Source: APPLIED PHYSICS LETTERS, 102 (20), p. 201609
Abstract: The surface of polycrystalline aluminum nitride (AlN) thin films is exposed to different gas discharge plasmas (N-2, O-2, and CF4) followed by a water-based colloidal seeding of ultra-dispersed nanodiamond particles. Fluorination of the AlN surface enhances the seeding density, whereas the oxidized surface does not yield any nucleation sites. In the former case, the seeding density improves by almost three orders of magnitude as compared to the untreated and N-2 pretreated samples, and allows to grow pinhole-free nanocrystalline diamond film on AlN. Finally, we demonstrate a route towards selective diamond growth on AlN thin films by employing CF4 plasma pretreatment together with photolithography. (C) 2013 AIP Publishing LLC.
Notes: [Pobedinskas, P.; Degutis, G.; Dexters, W.; Janssen, W.; Janssens, S. D.; Conings, B.; Ruttens, B.; D'Haen, J.; Boyen, H. -G.; Hardy, A.; Van Bael, M. K.; Haenen, K.] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Pobedinskas, P.; Janssen, W.; Janssens, S. D.; Ruttens, B.; D'Haen, J.; Boyen, H. -G.; Hardy, A.; Van Bael, M. K.; Haenen, K.] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. paulius.pobedinskas@uhasselt.be; ken.haenen@uhasselt.be
Keywords: Physics, Applied
Document URI: http://hdl.handle.net/1942/15379
ISSN: 0003-6951
e-ISSN: 1077-3118
DOI: 10.1063/1.4807591
ISI #: 000320619300030
Category: A1
Type: Journal Contribution
Validations: ecoom 2014
Appears in Collections:Research publications

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