Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/16748
Title: | Structural and dielectric properties of parylene-VT4 thin films | Authors: | Kahouli, A. Sylvestre, A. Laithier, J. -F. LUTSEN, Laurence Pairis, S. Andre, E. Garden, J. -L. |
Issue Date: | 2014 | Source: | MATERIALS CHEMISTRY AND PHYSICS, 143 (3), p. 908-914 | Abstract: | 58% semi-crystalline thin parylene-VT4 (eH2CeC6F4eCH2 )n films, have been investigated by dielectric spectroscopy for temperature and frequency ranges of [ 120 to 380 C] and [0.1e105 Hz] respectively. The study comprises a detailed investigation of the dielectric constant, dielectric loss and AC conductivity of this fluoropolymer. Dielectric behavior of parylene-VT4 is represented by a low dielectric constant with values in the range of 2.05e2.35 while the dielectric losses indicate the presence of two relaxation processes. Maxwell Wagner Sillars (MWS) polarization at the amorphous/crystalline interfaces with activation energy of 1.6 eV is due to the oligomer orientation. Electrical conductivity obeys to the well-known Jonscher law. The plateau in the low frequency part of this conductivity is temperature-dependent and follows an Arrhenius behavior with activation energy of 1.17 eV (deep traps) due to the fluorine diffusion. Due to its thermal stability with a high decomposition temperature (around 400 C under air and 510 C under nitrogen) and due to its good resistivity at low frequency (1015e1017 U m 1), parylene-VT4 constitutes a very attractive polymer for microelectronic applications as low k dielectric. Moreover, when parylene-VT4 is subjected to an annealing, the dielectric properties can be still more improved. | Notes: | Kahouli, A (reprint author), [Show the Organization-Enhanced name(s)] Univ Grenoble 1, Grenoble Elect Engn Lab, G INP, CNRS, 25 Rue Martyrs,BP 166, F-38042 Grenoble 9, France. kahouli.kader@gmail.com | Keywords: | polymers; thin films; vapor deposition; dielectric properties; annealing | Document URI: | http://hdl.handle.net/1942/16748 | ISSN: | 0254-0584 | e-ISSN: | 1879-3312 | DOI: | 10.1016/j.matchemphys.2013.08.044 | ISI #: | 000331347500004 | Rights: | © 2013 Elsevier B.V. All rights reserved. | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2015 |
Appears in Collections: | Research publications |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
kahouli 1.pdf Restricted Access | Published version | 1.18 MB | Adobe PDF | View/Open Request a copy |
SCOPUSTM
Citations
10
checked on Sep 3, 2020
WEB OF SCIENCETM
Citations
22
checked on Apr 30, 2024
Page view(s)
142
checked on Sep 6, 2022
Download(s)
138
checked on Sep 6, 2022
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.