Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/17172| Title: | Substitutional phosphorus incorporation in nanocrystalline CVD diamond thin films | Authors: | JANSSEN, Wiebke TURNER, Stuart Sakr, Georges Jomard, Franois Barjon, Julien DEGUTIS, Giedrius Lu, Ying-Gang D'HAEN, Jan HARDY, An VAN BAEL, Marlies Verbeeck, Johan Van Tendeloo, Gustaaf HAENEN, Ken |
Issue Date: | 2014 | Publisher: | WILEY-V C H VERLAG GMBH | Source: | PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 8 (8), p. 705-709 | Abstract: | Nanocrystalline diamond (NCD) thin films were produced by chemical vapor deposition (CVD) and doped by the addition of phosphine to the gas mixture. The characterization of the films focused on probing the incorporation and distribution of the phosphorus (P) dopants. Electron microscopy evaluated the overall film morphology and revealed the interior structure of the nanosized grains. The homogeneous films with distinct diamond grains featured a notably low sp(2):sp(3)-ratio as confirmed by Raman spectroscopy. High resolution spectroscopy methods demonstrated a homogeneous P-incorporation, both in-depth and in-plane. The P concentration in the films was determined to be in the order of 10(19) cm(-3) with a significant fraction integrated at substitutional donor sites. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim | Notes: | [Janssen, Wiebke; Degutis, Giedrius; D'Haen, Jan; Hardy, An; Van Bael, Marlies; Haenen, Ken] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Janssen, Wiebke; D'Haen, Jan; Hardy, An; Van Bael, Marlies; Haenen, Ken] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. [Turner, Stuart; Lu, Ying-Gang; Verbeeck, Johan; Van Tendeloo, Gustaaf] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium. [Sakr, Georges; Jomard, Franois; Barjon, Julien] Univ Versailles St Quentin, CNRS, GEMaC, F-78035 Versailles, France. | Keywords: | nanocrystalline diamonds; phosphorus incorporation; chemical vapor deposition; spectroscopy methods;nanocrystalline diamonds; phosphorus incorporation; chemical vapor deposition; spectroscopy methods | Document URI: | http://hdl.handle.net/1942/17172 | ISSN: | 1862-6254 | e-ISSN: | 1862-6270 | DOI: | 10.1002/pssr.201409235 | ISI #: | 000340484100007 | Rights: | © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2015 |
| Appears in Collections: | Research publications |
Show full item record
SCOPUSTM
Citations
12
checked on Sep 5, 2020
WEB OF SCIENCETM
Citations
21
checked on Apr 22, 2024
Page view(s)
98
checked on Sep 4, 2022
Download(s)
82
checked on Sep 4, 2022
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.