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Title: | Ultra high amorphous silicon passivation quality of crystalline silicon surface using in-situ post-deposition treatments | Authors: | Meddeb, H. Bearda, Twan Dimassi, Wissem Abdulraheem, Yaser Ezzaouia, Hatem GORDON, Ivan Szlufcik, Jozef POORTMANS, Jef |
Issue Date: | 2015 | Publisher: | WILEY-V C H VERLAG GMBH | Source: | PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 9 (1), p. 53-56 | Abstract: | A parametric study of post-deposition hydrogen plasma treatment of intrinsic a:Si:H films is performed. We demonstrate a significant improvement in passivation of c-Si(100) promoting epitaxy after an in-situ hydrogen plasma treatment depending mainly on the pressure and slightly on the power. Plasma diagnostic indicates an increase of H* signal with high power and low pressure. However, our analysis reveals a better hydrogen incorporation with high pressure and a slight increase in monohydride with high power. Longer H-2 plasma duration up to 50 s shows no detrimental effect on the passivation quality. Optimizing the in-situ H-2 plasma treatment, high minority carrier lifetime over 15 ms was achieved after short thermal annealing. ((c) 2015 WILEY-VCH Verlag GmbH &Co. KGaA, Weinheim) | Notes: | [Meddeb, H.] Ctr Excellence Nanomfg Applicat CENA, KACST Intel Consortium, Riyadh, Saudi Arabia. [Meddeb, H.; Bearda, Twan; Gordon, Ivan; Szlufcik, Jozef; Poortmans, Jef] IMEC, B-3001 Heverlee, Belgium. [Meddeb, H.; Dimassi, Wissem; Ezzaouia, Hatem] Res & Technol Ctr Energy, Photovolta Dept, Hammam Lif 2050, Tunisia. [Meddeb, H.] Univ Carthage, Fac Sci Bizerta, Carthage, Tunisia. [Abdulraheem, Yaser] Kuwait Univ, Dept Elect Engn, Coll Engn & Petr, Safat 13060, Kuwait. [Poortmans, Jef] Univ Hasselt, Fac Sci, B-3500 Hasselt, Belgium. hosny.meddeb@gmail.com | Keywords: | surface passivation; amorphous materials; silicon; hydrogen; plasma treatment; PECVD;surface passivation; amorphous materials; silicon; hydrogen; plasma treatment; PECVD | Document URI: | http://hdl.handle.net/1942/18717 | ISSN: | 1862-6254 | e-ISSN: | 1862-6270 | DOI: | 10.1002/pssr.201409494 | ISI #: | 000348763500008 | Rights: | © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2016 |
Appears in Collections: | Research publications |
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