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Title: | CVD diamond growth from nanodiamond seeds buried under a thin chromium layer | Authors: | DEGUTIS, Giedrius POBEDINSKAS, Paulius TURNER, Stuart Lu, Y. -G. Al Riyami, S. RUTTENS, Bart Yoshitake, T. D'HAEN, Jan HAENEN, Ken Verbeeck, J. HARDY, An VAN BAEL, Marlies |
Issue Date: | 2016 | Publisher: | ELSEVIER SCIENCE SA | Source: | DIAMOND AND RELATED MATERIALS, 64, p. 163-168 | Abstract: | This work presents a morphological and structural analysis of CVD diamond growth on silicon from nanodiamond seeds covered by a 50 nm thick chromium layer. The role of carbon diffusion as well as chromium and carbon silicide formation is analyzed. The local diamond environment is investigated by scanning transmission electron microscopy in combination with electron energy-loss spectroscopy. The evolution of the diamond phase composition (sp(3)/sp(2)) is evaluated by micro-Raman spectroscopy. Raman and X-ray diffraction analysis are used to identify the interfacial phases formed during CVD growth. Based upon the observed morphological and structural evolution, a diamond growth model from nanodiamond seeds buried beneath a thin Cr layer is proposed. (C) 2016 Elsevier B.V. All rights reserved. | Notes: | [Degutis, G.; Pobedinskas, P.; Al Riyami, S.; Haenen, K.; Hardy, A.; Van Bael, M. K.] Hasselt Univ, Inst Mat Res IMO, B-3500 Hasselt, Belgium. [Pobedinskas, P.; Ruttens, B.; D'Haen, J.; Haenen, K.; Hardy, A.; Van Bael, M. K.] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. [Turner, S.; Lu, Y. -G.; Verbeeck, J.] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium. [Lu, Y. -G.; Al Riyami, S.; Yoshitake, T.] Univ N Carolina, Dept Mech Engn & Engn Sci, Charlotte, NC 28223 USA. [Lu, Y. -G.; Al Riyami, S.; Yoshitake, T.] Kyushu Univ, 6-1 Kasuga, Fukuoka 8168580, Japan. [Al Riyami, S.] German Univ Technol Oman, Barka, Oman. | Keywords: | CVD diamond; Cr diffusion; Cr carburization; Si-Cr interface;CVD diamond; Cr diffusion; Cr carburization; Si-Cr interface | Document URI: | http://hdl.handle.net/1942/21566 | ISSN: | 0925-9635 | e-ISSN: | 1879-0062 | DOI: | 10.1016/j.diamond.2016.02.013 | ISI #: | 000374608100020 | Rights: | © 2016 Elsevier B.V. All rights reserved. | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2017 |
Appears in Collections: | Research publications |
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