Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/22052
Title: | Elucidation of the Growth Mechanism of Sputtered 2D Hexagonal Boron Nitride Nanowalls | Authors: | HOANG, Quang POBEDINSKAS, Paulius NICLEY, Shannon TURNER, Stuart JANSSENS, Stoffel VAN BAEL, Marlies D'HAEN, Jan HAENEN, Ken |
Issue Date: | 2016 | Publisher: | AMER CHEMICAL SOC | Source: | CRYSTAL GROWTH & DESIGN, 16(7), p. 3699-3708 | Abstract: | Hexagonal boron nitride nanowall thin films were deposited on Si(100) substrates using a Ar(51%)/N-2(44%)/H-2(5%) gas mixture by unbalanced radio frequency sputtering. The effects of various target-to-substrate distances, substrate temperatures, and substrate tilting angles were investigated. When the substrate is close to the target, hydrogen etching plays a significant role in the film growth, while the effect is negligible for films deposited at a farther distance. The relative quantity of defects was measured by a non-destructive infrared spectroscopy technique that characterized the hydrogen incorporation at dangling nitrogen bonds at defect sites in the deposited films. Despite the films deposited at different substrate tilting angles, the nanowalls of those films were found to consistently grow vertical to the substrate surface, independent of the tilting angle. This implies that chemical processes, rather than physical ones, govern the growth of the nanowalls. The results also reveal that the degree of nanowall crystallization is tunable by varying the growth parameters. Finally, evidence of hydrogen desorption during vacuum annealing is given based on measurements of infrared stretching (E-1u) and bending (A(2u)) modes of the optical phonons, and the H-N vibration mode. | Notes: | [Hoang, Duc-Quang; Pobedinskas, Paulius; Nicley, Shannon S.; Janssens, Stoffel D.; Van Bael, Marlies K.; D'Haen, Jan; Haenen, Ken] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Hoang, Duc-Quang; Pobedinskas, Paulius; Nicley, Shannon S.; Janssens, Stoffel D.; Van Bael, Marlies K.; D'Haen, Jan; Haenen, Ken] IMEC Vzw, IMOMEC, B-3590 Diepenbeek, Belgium. [Turner, Stuart] Univ Antwerp, Electron Microscopy Mat Sci, B-2000 Antwerp, Belgium. | Document URI: | http://hdl.handle.net/1942/22052 | ISSN: | 1528-7483 | e-ISSN: | 1528-7505 | DOI: | 10.1021/acs.cgd.6b00191 | ISI #: | 000379456700020 | Rights: | © 2016 American Chemical Society | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2017 |
Appears in Collections: | Research publications |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
acs%2Ecgd%2E6b00191.pdf Restricted Access | Published version | 9.93 MB | Adobe PDF | View/Open Request a copy |
SCOPUSTM
Citations
9
checked on Sep 7, 2020
WEB OF SCIENCETM
Citations
12
checked on Oct 12, 2024
Page view(s)
64
checked on Sep 7, 2022
Download(s)
68
checked on Sep 7, 2022
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.