Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/2409
Title: MTF test system with AC based dynamic joule correction for electromigration tests on interconnects
Authors: BIESEMANS, Leen 
Schepers, K
VANSTREELS, Kris 
D'HAEN, Jan 
DE CEUNINCK, Ward 
D'OLIESLAEGER, Marc 
Issue Date: 2004
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Source: MICROELECTRONICS RELIABILITY, 44(9-11). p. 1849-1854
Abstract: For accelerated electromigration tests to be accurately measured and extrapolated, the sample temperature has to remain constant during the entire test. Conventional Median Time to Failure (MTF) test systems take the joule heating into account only at the beginning of the test, which is not sufficient. A solution to this problem was formulated by Scandurra et al. by introducing a DC-current based dynamic joule correction. In this paper, a new test system has been developed which makes use of an AC-current based dynamic joule correction. In this way, no electromigration effects take place during the determination of the thermal resistance. (C) 2004 Elsevier Ltd. All-rights-reserved.
Notes: Limburgs Univ Ctr, Inst Mat Res, B-3590 Diepenbeek, Belgium. IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium. Hsch Limburg, B-3590 Diepenbeek, Belgium.Biesemans, L, Limburgs Univ Ctr, Inst Mat Res, Wetenschapspk 1, B-3590 Diepenbeek, Belgium.
Document URI: http://hdl.handle.net/1942/2409
ISSN: 0026-2714
e-ISSN: 1872-941X
DOI: 10.1016/j.microrel.2004.07.096
ISI #: 000224280000097
Category: A1
Type: Journal Contribution
Validations: ecoom 2005
Appears in Collections:Research publications

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