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http://hdl.handle.net/1942/2416
Title: | Direct patterning of photosensitive chemical solution deposition PZT layers | Authors: | Marson, S Dorey, RA Zhang, Q Whatmore, RW HARDY, An MULLENS, Jules |
Issue Date: | 2004 | Publisher: | ELSEVIER SCI LTD | Source: | JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 24(6). p. 1925-1928 | Abstract: | A highly concentrated solution for producing photopatternable layers of lead zirconate titanate (PZT) was prepared by dissolving into acrylic acid an amorphous PZT powder which was obtained by a sol-gel process. The solution was found to be suitable for spin-coating PZT layers that are photosensitive to UV radiation. After deposition and subsequent exposure the PZT film showed a decreased solubility in several organic compounds. These properties were exploited to create features on platinised silicon (Si) substrates. A thermogravimetric analysis was performed on the solution to determine the best thermal profile for the burn out of the organics. PZT features up to 2 mum thick were obtained after the firing process. (C) 2003 Elsevier Ltd. All rights reserved. | Notes: | Cranfield Univ, Sch Ind & Mfg Sci, Nanotechnol Grp, Cranfield MK43 0AL, Beds, England. Limburgs Univ Ctr, Lab Inorgan & Phys Chem, Diepenbeek, Belgium.Dorey, RA, Cranfield Univ, Sch Ind & Mfg Sci, Nanotechnol Grp, Cranfield MK43 0AL, Beds, England.r.a.dorey@cranfield.ac.uk | Keywords: | drying; films; photopatterning; PZT; sol-gel process | Document URI: | http://hdl.handle.net/1942/2416 | ISSN: | 0955-2219 | e-ISSN: | 1873-619X | DOI: | 10.1016/S0955-2219(03)00543-0 | ISI #: | 000189247800205 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2005 |
Appears in Collections: | Research publications |
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