Effect of power mode, target type and liquid nitrogen trap on the structure and tribological properties of MoSx coatings

Abstract

MoSx coatings were prepared with an unbalanced DC magnetron-sputtering system by varying the DC power mode, target type and liquid nitrogen trap. The composition and surface morphology were examined by energy dispersive X-ray and scanning electron microscopy; structural characterization was determined by X-ray diffraction. The friction and wear properties were evaluated with a fretting tester in dry ( < 10% relative humidity) and humid (50% and 90% relative humidity) air. MoSx coatings deposited by simple DC power tended to form rougher surfaces, and had a higher edge orientation of crystallites with worse tribological performance than those by bipolar pulsed DC power. MoSx coatings made by a cold pressed target had a lower deposition rate, and were inclined to form (002) basal orientations parallel to the surface especially at higher argon pressures. The contents of oxygen and carbon in the MoSx coating with the use of liquid nitrogen trap were greatly reduced, but MoSx coatings had lower coefficients of friction and shorter wear life at higher relative humidity. The role of these deposition variables in the formation process is discussed. (C) 2002 Elsevier Science B.V All rights reserved.