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http://hdl.handle.net/1942/2533
Title: | Effect of power mode, target type and liquid nitrogen trap on the structure and tribological properties of MoSx coatings | Authors: | Wang, JH LAUWERENS, Walter WIEERS, Els STALS, Lambert He, JW Celis, JP |
Issue Date: | 2002 | Publisher: | ELSEVIER SCIENCE SA | Source: | SURFACE & COATINGS TECHNOLOGY, 153(2-3). p. 166-172 | Abstract: | MoSx coatings were prepared with an unbalanced DC magnetron-sputtering system by varying the DC power mode, target type and liquid nitrogen trap. The composition and surface morphology were examined by energy dispersive X-ray and scanning electron microscopy; structural characterization was determined by X-ray diffraction. The friction and wear properties were evaluated with a fretting tester in dry ( < 10% relative humidity) and humid (50% and 90% relative humidity) air. MoSx coatings deposited by simple DC power tended to form rougher surfaces, and had a higher edge orientation of crystallites with worse tribological performance than those by bipolar pulsed DC power. MoSx coatings made by a cold pressed target had a lower deposition rate, and were inclined to form (002) basal orientations parallel to the surface especially at higher argon pressures. The contents of oxygen and carbon in the MoSx coating with the use of liquid nitrogen trap were greatly reduced, but MoSx coatings had lower coefficients of friction and shorter wear life at higher relative humidity. The role of these deposition variables in the formation process is discussed. (C) 2002 Elsevier Science B.V All rights reserved. | Notes: | Tianjin Univ, Sch Mat Sci & Engn, Tianjin 300072, Peoples R China. Limburgs Univ Ctr, Inst Mat Res, B-3590 Diepenbeek, Belgium. Xian Jiaotong Univ, State Key Lab MBM, Xian 710049, Peoples R China. Katholieke Univ Leuven, Dept MTM, B-3001 Louvain, Belgium.Wang, JH, Tianjin Univ, Sch Mat Sci & Engn, Tianjin 300072, Peoples R China. | Keywords: | MoSx; composition and structure; magnetron sputtering; friction and wear | Document URI: | http://hdl.handle.net/1942/2533 | ISSN: | 0257-8972 | e-ISSN: | 1879-3347 | DOI: | 10.1016/S0257-8972(01)01665-6 | ISI #: | 000174831600012 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2003 |
Appears in Collections: | Research publications |
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