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http://hdl.handle.net/1942/31634
Title: | Advancing CMOS beyond the Si roadmap with Ge and III/V devices | Authors: | Heyns, M. Alian, A. BRAMMERTZ, Guy Caymax, M. Chang, Y. C. Chu, L. K. De Jaeger, B. Eneman, G. Gencarelli, F. Groeseneken, G. Hellings, G. Hikavyy, A. Hoffmann, T. Y. Houssa, M. Huyghebaert, C. Leonelli, D. Lin, D. Loo, R. Magnus, W. Merckling, C. MEURIS, Marc Mitard, J. Nyns, L. Orzali, T. Rooyackers, R. Sioncke, S. Soree, B. Sun, X. Vandooren, A. Verhulst, A. S. Vincent, B. Waldron, N. Wang, G. Wang, W. E. Witters, L. |
Issue Date: | 2011 | Publisher: | IEEE | Source: | 2011 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), IEEE, | Notes: | Heyns, M (corresponding author), IMEC, Kapeldreef 75, B-3001 Louvain, Belgium. | Keywords: | ATOMIC LAYER DEPOSITION | Document URI: | http://hdl.handle.net/1942/31634 | ISBN: | 978-1-4577-0505-2 | ISI #: | WOS:000300015300075 | Category: | C1 | Type: | Proceedings Paper |
Appears in Collections: | Research publications |
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