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http://hdl.handle.net/1942/31662
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DC Field | Value | Language |
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dc.contributor.author | Clarysse, T. | - |
dc.contributor.author | BRAMMERTZ, Guy | - |
dc.contributor.author | Vanhaeren, D. | - |
dc.contributor.author | Eyben, P. | - |
dc.contributor.author | Goossens, J. | - |
dc.contributor.author | Clemente, F. | - |
dc.contributor.author | MEURIS, Marc | - |
dc.contributor.author | Vandervorst, W. | - |
dc.contributor.author | Srnanek, R. | - |
dc.contributor.author | Kinder, R. | - |
dc.contributor.author | Li, Zhiqiang | - |
dc.contributor.author | Sciana, B. | - |
dc.contributor.author | Radziewicz, D. | - |
dc.date.accessioned | 2020-08-11T13:22:08Z | - |
dc.date.available | 2020-08-11T13:22:08Z | - |
dc.date.issued | 2008 | - |
dc.date.submitted | 2020-07-30T09:12:28Z | - |
dc.identifier.citation | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 11 (5-6) , p. 259 -266 | - |
dc.identifier.uri | http://hdl.handle.net/1942/31662 | - |
dc.description.abstract | As CMOS is approaching the 22 nm node, the importance of high-mobility materials such as Ge and GaAs is rapidly increasing. For the timely development of these new technologies accurate dopant and carrier-profiling solutions for source-drain extensions with these materials are required. Identical n-type-doped (Si, Se) layers on same and opposite type medium-doped layers on S.I. GaAs substrates will be investigated, with layer thicknesses ranging from 200 down to 50 nm and doping concentration levels up to 1e20 at/cm(3). In this work, secondary ion mass spectrometry will be used for dopant profiling. For GaAs carrier profiling, conventional spreading resistance probe, as commonly used in Si-CMOS, fails. Hence, reliable alternatives need to be found for characterizing these high-low structures. Techniques to be discussed range from the more conventional approaches such as Hall or electrochemical capacitance-voltage (performed by different laboratories), over micro-Raman spectroscopy and photoluminescence along a beveled surface, up to more advanced approaches using scanning spreading resistance microscopy. (C) 2008 Elsevier Ltd. All rights reserved. | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCI LTD | - |
dc.rights | 2008 Elsevier Ltd. All rights reserved. | - |
dc.subject.other | GaAs | - |
dc.subject.other | Carrier profiling | - |
dc.subject.other | Scanning spreading resistance microscopy | - |
dc.title | Accurate carrier profiling of n-type GaAs junctions | - |
dc.type | Journal Contribution | - |
local.bibliographicCitation.conferencedate | MAY 26-30, 2008 | - |
local.bibliographicCitation.conferencename | International Symposium on Beyond Silicon Technology held at the 2008 EMRS Spring Meeting | - |
local.bibliographicCitation.conferenceplace | Strasbourg, FRANCE | - |
dc.identifier.epage | 266 | - |
dc.identifier.issue | 5-6 | - |
dc.identifier.spage | 259 | - |
dc.identifier.volume | 11 | - |
local.bibliographicCitation.jcat | A1 | - |
dc.description.notes | Clarysse, T (corresponding author), IMEC, Kapeldreef 75, B-3001 Louvain, Belgium. | - |
dc.description.notes | trudo.clarysse@imec.be | - |
local.publisher.place | THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, OXON, ENGLAND | - |
local.type.refereed | Refereed | - |
local.type.specified | Article | - |
dc.identifier.doi | 10.1016/j.mssp.2008.11.010 | - |
dc.identifier.isi | WOS:000271700600023 | - |
dc.contributor.orcid | Sciana, Beata/0000-0001-8771-3545; Brammertz, Guy/0000-0003-1404-7339 | - |
dc.identifier.eissn | - | |
dc.identifier.eissn | 1873-4081 | - |
local.provider.type | wosris | - |
local.uhasselt.uhpub | no | - |
local.description.affiliation | [Clarysse, T.; Brammertz, G.; Vanhaeren, D.; Eyben, P.; Goossens, J.; Clemente, F.; Meuris, M.; Vandervorst, W.] IMEC, B-3001 Louvain, Belgium. | - |
local.description.affiliation | [Vandervorst, W.] Katholieke Univ Leuven, IKS, Dept Phys, B-3001 Louvain, Belgium. | - |
local.description.affiliation | [Srnanek, R.; Kinder, R.] Slovak Tech Univ, Dept Microelect, Bratislava 81219, Slovakia. | - |
local.description.affiliation | [Sciana, B.; Radziewicz, D.] Wroclaw Univ Technol, Inst Microsyst Technol, Fac Elect, PL-50372 Wroclaw, Poland. | - |
local.description.affiliation | [Li, Zhiqiang] Nanometrics Inc, Bend, OR 97702 USA. | - |
item.fullcitation | Clarysse, T.; BRAMMERTZ, Guy; Vanhaeren, D.; Eyben, P.; Goossens, J.; Clemente, F.; MEURIS, Marc; Vandervorst, W.; Srnanek, R.; Kinder, R.; Li, Zhiqiang; Sciana, B. & Radziewicz, D. (2008) Accurate carrier profiling of n-type GaAs junctions. In: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 11 (5-6) , p. 259 -266. | - |
item.accessRights | Restricted Access | - |
item.fulltext | With Fulltext | - |
item.contributor | Clarysse, T. | - |
item.contributor | BRAMMERTZ, Guy | - |
item.contributor | Vanhaeren, D. | - |
item.contributor | Eyben, P. | - |
item.contributor | Goossens, J. | - |
item.contributor | Clemente, F. | - |
item.contributor | MEURIS, Marc | - |
item.contributor | Vandervorst, W. | - |
item.contributor | Srnanek, R. | - |
item.contributor | Kinder, R. | - |
item.contributor | Li, Zhiqiang | - |
item.contributor | Sciana, B. | - |
item.contributor | Radziewicz, D. | - |
crisitem.journal.issn | 1369-8001 | - |
crisitem.journal.eissn | 1873-4081 | - |
Appears in Collections: | Research publications |
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1-s2.0-S1369800108000954-main.pdf Restricted Access | Published version | 451.72 kB | Adobe PDF | View/Open Request a copy |
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