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http://hdl.handle.net/1942/31662
Title: | Accurate carrier profiling of n-type GaAs junctions | Authors: | Clarysse, T. BRAMMERTZ, Guy Vanhaeren, D. Eyben, P. Goossens, J. Clemente, F. MEURIS, Marc Vandervorst, W. Srnanek, R. Kinder, R. Li, Zhiqiang Sciana, B. Radziewicz, D. |
Issue Date: | 2008 | Publisher: | ELSEVIER SCI LTD | Source: | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 11 (5-6) , p. 259 -266 | Abstract: | As CMOS is approaching the 22 nm node, the importance of high-mobility materials such as Ge and GaAs is rapidly increasing. For the timely development of these new technologies accurate dopant and carrier-profiling solutions for source-drain extensions with these materials are required. Identical n-type-doped (Si, Se) layers on same and opposite type medium-doped layers on S.I. GaAs substrates will be investigated, with layer thicknesses ranging from 200 down to 50 nm and doping concentration levels up to 1e20 at/cm(3). In this work, secondary ion mass spectrometry will be used for dopant profiling. For GaAs carrier profiling, conventional spreading resistance probe, as commonly used in Si-CMOS, fails. Hence, reliable alternatives need to be found for characterizing these high-low structures. Techniques to be discussed range from the more conventional approaches such as Hall or electrochemical capacitance-voltage (performed by different laboratories), over micro-Raman spectroscopy and photoluminescence along a beveled surface, up to more advanced approaches using scanning spreading resistance microscopy. (C) 2008 Elsevier Ltd. All rights reserved. | Notes: | Clarysse, T (corresponding author), IMEC, Kapeldreef 75, B-3001 Louvain, Belgium. trudo.clarysse@imec.be |
Keywords: | GaAs;Carrier profiling;Scanning spreading resistance microscopy | Document URI: | http://hdl.handle.net/1942/31662 | ISSN: | 1369-8001 | e-ISSN: | 1873-4081 | DOI: | 10.1016/j.mssp.2008.11.010 | ISI #: | WOS:000271700600023 | Rights: | 2008 Elsevier Ltd. All rights reserved. | Category: | A1 | Type: | Journal Contribution |
Appears in Collections: | Research publications |
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