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http://hdl.handle.net/1942/3235
Title: | Quantitation of major elements with secondary ion mass spectrometry by using M-2(+)-molecular ions | Authors: | VLEKKEN, Johan WU, Ting-Di D'OLIESLAEGER, Marc KNUYT, Gilbert Vandervorst, W DE SCHEPPER, Luc |
Issue Date: | 1998 | Publisher: | ELSEVIER SCIENCE INC | Source: | JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY, 9(6). p. 638-642 | Abstract: | A new quantitation method, based on the detection of M-2(+) molecular ions, is presented. It has been shown that M-2(+) molecular ions are formed by a recombination process between independently sputtered M and M+ particles. Based on this formation mechanism, it will be demonstrated that M-2(+) molecular ions can be used to quantitate major elements. The method will be used for quantitation of an AlxGa1-xAs multilayer. Furthermore, it will be shown that some matrix effects can be explained by the energy dependence of instrument transmission. (C) 1998 American Society for Mass Spectrometry. | Notes: | Limburgs Univ Ctr, Inst Mat Res, Div Mat Phys, B-3590 Diepenbeek, Belgium. IMEC VZW, Leuven, Belgium.Vlekken, J, Limburgs Univ Ctr, Inst Mat Res, Div Mat Phys, Univ Campus,Wetenschapspark 1, B-3590 Diepenbeek, Belgium. | Document URI: | http://hdl.handle.net/1942/3235 | DOI: | 10.1016/S1044-0305(98)00028-2 | ISI #: | 000073734700010 | Type: | Journal Contribution | Validations: | ecoom 1999 |
Appears in Collections: | Research publications |
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