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http://hdl.handle.net/1942/33898| Title: | Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries | Authors: | Henderick, Lowie HAMED, Hamid Mattelaer, Felix Minjauw, Matthias Meersschaut, Johan Dendooven, Jolien SAFARI, Momo Vereecken, Philippe Detavernier, Christophe |
Issue Date: | 2021 | Publisher: | Source: | JOURNAL OF POWER SOURCES, 497 (Art N° 229866) | Abstract: | PE-ALD of nitrogen doped Ti-phosphate has been investigated in two dierent deposition processes. Both processes were analysed by in-situ ellipsometry (to monitor the growth of the lm) and X-ray photoelectron spectroscopy/elastic recoil detection (to study the composition). First, previous knowledge on rapid PE-ALD of undoped Ti-phosphate using an exposure sequence of trimethyl phosphate plasma-oxygen plasma-titanium isopropoxide, i.e. TMP*-O* 2-TTIP, was used to 1 | Keywords: | Atomic layer deposition;Plasma-enhanced deposition;Nitrogen doping;Titanium phosphate;Lithium-ion battery;Functional coating | Document URI: | http://hdl.handle.net/1942/33898 | ISSN: | 0378-7753 | e-ISSN: | 1873-2755 | DOI: | 10.1016/j.jpowsour.2021.229866 | ISI #: | WOS:000647598400007 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2022 |
| Appears in Collections: | Research publications |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| N-doping of Ti-phosphate.pdf | Peer-reviewed author version | 2.07 MB | Adobe PDF | View/Open |
| 1-s20-S0378775321004031-main.pdf Restricted Access | Published version | 2.24 MB | Adobe PDF | View/Open Request a copy |
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