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Title: | Comparison of C-, N-, and O-Incorporated Non-blistering PECVD Si Films for Application in SiOx-Based Passivating Contacts for Si Solar Cells | Authors: | SHARMA, Rajiv Alleva, Alessandro Hajjiah, Ali SIVARAMAKRISHNAN RADHAKRISHNAN, Hariharsudan POORTMANS, Jef |
Issue Date: | 2022 | Publisher: | AMER CHEMICAL SOC | Source: | ACS Applied Energy Materials, 5 (8) , p. 9994 -10001 | Abstract: | For application in high-efficiency silicon solar cells bearing SiOx-based passivating contacts, we have developed 100 nm thick, PECVD Si-rich amorphous films, capable of being processed in industrial furnaces without blistering, by incorporating adequate amounts of each of C, N, and O in the films during PECVD. We found that non-blistering of the films is a result of the low intrinsic stress (compressive) in the films and not due to a low H content, which, in fact, is much higher in the non-blistering films than in the C-, N-, and O-free films. Among the three types of nonblistering Si-rich amorphous films, we conclude that the O-incorporated one is the most suitable for application in SiOx-based passivating contacts owing to the film's high excess Si content and ability to crystallize. | Notes: | Sharma, R (corresponding author), Imo Imomec, IMEC, B-3600 Genk, Belgium.; Sharma, R (corresponding author), EnergyVille, Imo Imomec, B-3600 Genk, Belgium.; Sharma, R (corresponding author), Hasselt Univ, Imo Imomec, B-3500 Hasselt, Belgium.; Sharma, R (corresponding author), Katholieke Univ Leuven, B-3001 Leuven, Belgium. rajiv.sharma@imec.be |
Keywords: | blistering;a-Si:H;PECVD;stress;poly-Si/SiOx contact;silicon solar cells | Document URI: | http://hdl.handle.net/1942/38135 | ISSN: | 2574-0962 | DOI: | 10.1021/acsaem.2c01631 | ISI #: | 000842981400001 | Rights: | 2022 American Chemical Society | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2023 |
Appears in Collections: | Research publications |
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Comparison of C-, N-, and O-Incorporated Non-blistering PECVD Si Films for Application in SiOx-Based Passivating Contacts for Si Solar Cells.pdf Restricted Access | Published version | 3.77 MB | Adobe PDF | View/Open Request a copy |
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