Study of the ion energy-distribution during physical vapor-deposition of TiN

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3817

Title:	Study of the ion energy-distribution during physical vapor-deposition of TiN
Authors:	NESLADEK, Milos QUAEYHAEGENS, Carl WOUTERS, Stan STALS, Lambert Bergmann, E. RETTINGHAUS, G
Issue Date:	1994
Publisher:	ELSEVIER SCIENCE SA LAUSANNE
Source:	SURFACE & COATINGS TECHNOLOGY, 68. p. 339-343
Abstract:	The energetic distribution of ions in a triode ion plating configuration during TiN deposition was investigated. The fluxes of different ions such as Ti+, N+, N-2(+), TiN+, TiAr+ impinging on the substrate, for various N partial pressures were measured by mass-energy spectrometry. The potential distribution in the plasma and the total ion flux towards the substrate were evaluated by Langmuir plasma probing. A model of the potential distribution in the triode ion plating plasma configuration is suggested and the Ti ionization for various plasma conditions is discussed.
Notes:	BALZERS AG,FL-9496 BALZERS,LIECHTENSTEIN.NESLADEK, M, LIMBURGS UNIV CENTRUM,INST MAT RES,DIV MAT PHYS,SCI PK,CAMPUSLAAN,B-3590 DIEPENBEEK,BELGIUM.
Document URI:	http://hdl.handle.net/1942/3817
ISI #:	A1994PW03900056
Type:	Journal Contribution
Appears in Collections:	Research publications

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