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http://hdl.handle.net/1942/3817| Title: | Study of the ion energy-distribution during physical vapor-deposition of TiN | Authors: | NESLADEK, Milos QUAEYHAEGENS, Carl WOUTERS, Stan STALS, Lambert Bergmann, E. RETTINGHAUS, G |
Issue Date: | 1994 | Publisher: | ELSEVIER SCIENCE SA LAUSANNE | Source: | SURFACE & COATINGS TECHNOLOGY, 68. p. 339-343 | Abstract: | The energetic distribution of ions in a triode ion plating configuration during TiN deposition was investigated. The fluxes of different ions such as Ti+, N+, N-2(+), TiN+, TiAr+ impinging on the substrate, for various N partial pressures were measured by mass-energy spectrometry. The potential distribution in the plasma and the total ion flux towards the substrate were evaluated by Langmuir plasma probing. A model of the potential distribution in the triode ion plating plasma configuration is suggested and the Ti ionization for various plasma conditions is discussed. | Notes: | BALZERS AG,FL-9496 BALZERS,LIECHTENSTEIN.NESLADEK, M, LIMBURGS UNIV CENTRUM,INST MAT RES,DIV MAT PHYS,SCI PK,CAMPUSLAAN,B-3590 DIEPENBEEK,BELGIUM. | Document URI: | http://hdl.handle.net/1942/3817 | ISI #: | A1994PW03900056 | Type: | Journal Contribution |
| Appears in Collections: | Research publications |
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