Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/3817
Title: | Study of the ion energy-distribution during physical vapor-deposition of TiN | Authors: | NESLADEK, Milos QUAEYHAEGENS, Carl WOUTERS, Stan STALS, Lambert Bergmann, E. RETTINGHAUS, G |
Issue Date: | 1994 | Publisher: | ELSEVIER SCIENCE SA LAUSANNE | Source: | SURFACE & COATINGS TECHNOLOGY, 68. p. 339-343 | Abstract: | The energetic distribution of ions in a triode ion plating configuration during TiN deposition was investigated. The fluxes of different ions such as Ti+, N+, N-2(+), TiN+, TiAr+ impinging on the substrate, for various N partial pressures were measured by mass-energy spectrometry. The potential distribution in the plasma and the total ion flux towards the substrate were evaluated by Langmuir plasma probing. A model of the potential distribution in the triode ion plating plasma configuration is suggested and the Ti ionization for various plasma conditions is discussed. | Notes: | BALZERS AG,FL-9496 BALZERS,LIECHTENSTEIN.NESLADEK, M, LIMBURGS UNIV CENTRUM,INST MAT RES,DIV MAT PHYS,SCI PK,CAMPUSLAAN,B-3590 DIEPENBEEK,BELGIUM. | Document URI: | http://hdl.handle.net/1942/3817 | ISI #: | A1994PW03900056 | Type: | Journal Contribution |
Appears in Collections: | Research publications |
Show full item record
WEB OF SCIENCETM
Citations
20
checked on Oct 14, 2024
Page view(s)
16
checked on Sep 7, 2022
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.