Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/5357
Title: A unified theoretical model for tensile and compressive residual film stress
Authors: KNUYT, Gilbert 
LAUWERENS, Walter 
STALS, Lambert 
Issue Date: 2000
Publisher: ELSEVIER SCIENCE SA
Source: Thin solid films, 370(1-2). p. 232-237
Document URI: http://hdl.handle.net/1942/5357
DOI: 10.1016/S0040-6090(00)00944-5
ISI #: 000087942200035
Category: A1
Type: Journal Contribution
Validations: ecoom 2001
Appears in Collections:Research publications

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