Towards an understanding of ion beam mixing by quantitative internal profiling: Cu in Si

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/6683

Title:	Towards an understanding of ion beam mixing by quantitative internal profiling: Cu in Si
Authors:	Tian, C. Gomez, J. Beyer, G.P. de Bisschop, P. Vandervorst, W. WU, Ting-Di D'OLIESLAEGER, Marc
Issue Date:	1998
Publisher:	Chichester Wiley 1998
Source:	Proceedings of the 11th International Conference on Secondary Ion Mass Spectrometry (SIMS 11, Orlando, Fla, 7-12 September 1997). p. 351-354.
Document URI:	http://hdl.handle.net/1942/6683
Type:	Proceedings Paper
Appears in Collections:	Research publications

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