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Title: Towards an understanding of ion beam mixing by quantitative internal profiling: Cu in Si
Authors: Tian, C.
Gomez, J.
Beyer, G.P.
de Bisschop, P.
Vandervorst, W.
WU, Ting-Di
Issue Date: 1998
Publisher: Chichester Wiley 1998
Source: Proceedings of the 11th International Conference on Secondary Ion Mass Spectrometry (SIMS 11, Orlando, Fla, 7-12 September 1997). p. 351-354.
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Type: Proceedings Paper
Appears in Collections:Research publications

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