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http://hdl.handle.net/1942/6683
Title: | Towards an understanding of ion beam mixing by quantitative internal profiling: Cu in Si | Authors: | Tian, C. Gomez, J. Beyer, G.P. de Bisschop, P. Vandervorst, W. WU, Ting-Di D'OLIESLAEGER, Marc |
Issue Date: | 1998 | Publisher: | Chichester Wiley 1998 | Source: | Proceedings of the 11th International Conference on Secondary Ion Mass Spectrometry (SIMS 11, Orlando, Fla, 7-12 September 1997). p. 351-354. | Document URI: | http://hdl.handle.net/1942/6683 | Type: | Proceedings Paper |
Appears in Collections: | Research publications |
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