Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/6906
Title: Investigation of the formation of sputtered oxide clusters with the Laser Assisted Sputtered Neutral Mass Spectroscopy technique (LASNMS)
Authors: VLEKKEN, Johan 
POLUS, Dany 
D'OLIESLAEGER, Marc 
Vandervorst, W.
DE SCHEPPER, Luc 
Issue Date: 2000
Publisher: ELSEVIER SCIENCE SA
Source: SIMS XII: Secondary Ion Mass Spectrsoscopy, Brussels. p. 341-344.
Document URI: http://hdl.handle.net/1942/6906
Category: C2
Type: Proceedings Paper
Appears in Collections:Research publications

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