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http://hdl.handle.net/1942/6906| Title: | Investigation of the formation of sputtered oxide clusters with the Laser Assisted Sputtered Neutral Mass Spectroscopy technique (LASNMS) | Authors: | VLEKKEN, Johan POLUS, Dany D'OLIESLAEGER, Marc Vandervorst, W. DE SCHEPPER, Luc |
Issue Date: | 2000 | Publisher: | ELSEVIER SCIENCE SA | Source: | SIMS XII: Secondary Ion Mass Spectrsoscopy, Brussels. p. 341-344. | Document URI: | http://hdl.handle.net/1942/6906 | Category: | C2 | Type: | Proceedings Paper |
| Appears in Collections: | Research publications |
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