Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/8148
Title: Energy and mass spectra of ions in triode ion plating of Ti(C,N) coatings
Authors: Wouters, S
Kadlec, S
NESLADEK, Milos 
QUAEYHAEGENS, Carl 
STALS, Lambert 
Issue Date: 1995
Publisher: ELSEVIER SCIENCE SA LAUSANNE
Source: SURFACE & COATINGS TECHNOLOGY, 76(1-3). p. 135-141
Abstract: Ti(C,N) coatings were deposited by triode ion plating in a mixture of argon, acetylene and nitrogen. The acetylene inlet was positioned at two different locations relative to the dense plasma. The energy distribution of selected ions during Ti(CxN1-x) deposition was measured by an energy resolved mass spectrometer. The mass spectra showed wide energy distributions of Ti ions, and energy distributions of other ionized molecules, clusters and radicals. A higher probability of acetylene dissociation with the acetylene inlet directed into the plasma was observed. Preferred orientation, lattice parameters and stress for the Ti(C,N) coatings were measured by X-ray diffraction. The measured compressive stress ranged from 8 to 13 GPa, the microhardness from 0.24 to 0.27 GPa. The scratch-test revealed an adhesion comparable to that of TiN coatings.
Notes: KATHOLICKE IND HOGESCH LIMBURG,DEPT IND WETENSCHAPPEN TECHNOL,B-3590 DIEPENBEEK,BELGIUM.Wouters, S, LIMBURGS UNIV CENTRUM,INST MAT RES,UNIV CAMPUS,WETENSCHAPSPK,B-3590 DIEPENBEEK,BELGIUM.
Keywords: titanium carbonitride; plasma diagnostics; hard coatings; thin film stress; energy-resolved mass spectroscopy
Document URI: http://hdl.handle.net/1942/8148
ISI #: A1995TM17900023
Type: Journal Contribution
Appears in Collections:Research publications

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