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http://hdl.handle.net/1942/8233
Title: | Growth of polycrystalline phosphorous-doped CVD diamond layers | Authors: | LAZEA, Andrada MORTET, Vincent D'HAEN, Jan Geithner, P. Ristein, J. D'OLIESLAEGER, Marc HAENEN, Ken |
Issue Date: | 2008 | Publisher: | ELSEVIER SCIENCE BV | Source: | CHEMICAL PHYSICS LETTERS, 454(4-6). p. 310-313 | Abstract: | Microwave plasma-enhanced chemical vapour deposition (MW PE CVD) growth conditions for preparation of polycrystalline phosphorous-doped diamond layers are presented. The incorporation of substitutional phosphorous was confirmed by low temperature photocurrent (PC) and cathodoluminescence (CL) measurements. The topographical characteristics of thefilms and the relation between the substrate and P-dopedfilm grain orientation were studied by scanning electron microscopy (SEM) and electron back-scattered diffraction (EBSD). The growth process for P-doped layers on (110) oriented polycrystalline diamond was optimised and the best set of parameters differs significantly from the standard conditions used for P-doping of single crystalline (111) oriented diamond surfaces. (c) 2008 Elsevier B.V. All rights reserved. | Notes: | Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. IMEC VZW, Div IMOMEC, Diepenbeek, Belgium. Univ Erlangen Nurnberg, Erlangen, Germany.Haenen, K, Hasselt Univ, Inst Mat Res IMO, Wetenschapspk 1, B-3590 Diepenbeek, Belgium.ken.haenen@uhasselt.be | Document URI: | http://hdl.handle.net/1942/8233 | ISSN: | 0009-2614 | e-ISSN: | 1873-4448 | DOI: | 10.1016/j.cplett.2008.02.030 | ISI #: | 000254425200032 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2009 |
Appears in Collections: | Research publications |
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