Browsing by Author/Editor/Contributor Beyer, G.

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Issue DateTitleAuthor(s)TypeCat.
2007Electrical performance, reliability and microstructure of sub-45 nm copper damascene lines fabricated with TEOS backfillLeaming-Sphabmixay, K.; VAN OLMEN, Jan ; Moon, K. J.; VANSTREELS, Kris ; D'HAEN, Jan ; Tokei, Z.; List, S.; Beyer, G.Journal ContributionA1
2007Thermomechanical properties of thin organosilicate glass films treated with ultraviolet-assisted cureIacopi, F.; Beyer, G.; Travaly, Y.; Waldfried, C.; Gage, D. M.; Dauskardt, R. H.; Houthoofd, K.; JACOBS , Marie-Paule; ADRIAENSENS, Peter ; Schulze, K.; Schulz, S. E.; List, S.; Carlotti, G.Journal ContributionA1
Showing results 1 to 2 of 2