Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/1584
Title: Seeding, growth and characterization of nanocrystalline diamond films on various substrates
Authors: DAENEN, Michael 
WILLIAMS, Oliver 
D'HAEN, Jan 
HAENEN, Ken 
NESLADEK, Milos 
Issue Date: 2006
Publisher: Wiley
Source: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 203(12). p. 3005-3010
Abstract: By optimizing seeding techniques and plasma parameters for deposition, nanocrystalline diamond (NCD) films were deposited on different sorts of substrates with varying parameters such as temperature and methane content. Results of this optimization process were analysed by SEM, XRD, Raman, and transmission measurements. Experiments with titanium interlayers lead to a better understanding of the nucleation step and can enhance the nucleation density. This research resulted in homogeneously coalesced NCD films of less than 100 nm thickness over 3 inch Si wafers. It is also shown that it is possible to grow on different sorts of glass, using a low temperature process
Keywords: 71.20.Mq • 78.67.Bf • 81.05.Uw • 81.07.Bc • 81.15.Gh
Document URI: http://hdl.handle.net/1942/1584
ISSN: 0031-8965
DOI: 10.1002/pssa.200671122
ISI #: 000240967400003
Category: A1
Type: Journal Contribution
Validations: ecoom 2007
Appears in Collections:Research publications

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