Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/4938
Title: Super secondary grain growth in the barrier/seedlayer system
Authors: VANSTREELS, Kris 
Brongersma, S.H.
Demuynck, S.
D'HAEN, Jan 
DE CEUNINCK, Ward 
D'OLIESLAEGER, Marc 
Maex, Karen
Issue Date: 2004
Publisher: MATERIALS RESEARCH SOCIETY
Source: Proceedings of the Advanced Metallization Conference 2004, San Diego, Calif., USA, October 19-21. p. 327-331.
Abstract: A new grain growth mode is observed in thick copper seed layers deposited on alpha-Ta barriers. It leads to highly concentric growth and grains of many tens of microns. Initiation and growth of the grains is shown to be dependent on both the barrier properties and the copper layer thickness. A clear rivalry between this growth mode and normal secondary grain growth is observed, where the latter dominates at elevated temperatures. Also the final grain orientations are very different as no (111) growth is observed for the new mechanism.
Document URI: http://hdl.handle.net/1942/4938
ISBN: 1-55899-814-4
ISI #: 000228037200043
Category: C1
Type: Proceedings Paper
Validations: ecoom 2006
Appears in Collections:Research publications

Show full item record

WEB OF SCIENCETM
Citations

1
checked on May 14, 2022

Page view(s)

14
checked on May 18, 2022

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.